Used SONGMAO SM-60120ULH #9315465 for sale
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SONGMAO SM-60120ULH is a high-performance wafer processing equipment designed to provide reliable and efficient production for industrial and research applications. This system is a fully automated and flexible platform, able to process a range of substrate materials in a variety of formats and sizes. The unit features a large workspace, providing excellent substrate throughput to maintain production rates. The ultra-low loading height (ULH) reduces stress on substrates, resulting in improved substrate quality. This is further enhanced by excellent low-level noise and vibration isolation, which helps reduce potential contamination. The machine is equipped with a high-precision wafer transport chassis, allowing precise positioning and alignment of wipers and substrates. The control and automation of SM-60120ULH is made possible by the use of an advanced motion control platform. This state-of-the-art platform provides a host of features, including temperature control, timing and motion control, as well as the ability to adjust various motor parameters. Additionally, the tool can be set up and runs in a variety of automatic and manual modes. Data collection and analysis of production can be performed with a variety of software packages, allowing the user to track and monitor the quality of each wafer processed. The asset can be configured with a wide range of process tools, including photoresist systems, etching systems, and other process tools. Additionally, the model is compatible with EQ scrubbers, resist spinners, and dry etchers, allowing for additional flexibility. SONGMAO SM-60120ULH comes with a micro-processing function, allowing precise parameters for each process recipe to be set with controlled accuracy. In addition to the features mentioned above, SM-60120ULH is also equipped with several safety devices, including a mechanical shutter to protect sensitive areas during operation, and optical safety eyes to warn of a potential hazard. The equipment also features a soft start-up switch to reduce operational shocks, and a failsafe switch to enable rapid shutdown for emergency situations. Overall, SONGMAO SM-60120ULH is a comprehensive and versatile wafer processing system. It is capable of processing a wide range of substrates, using a variety of tools and processes, and is capable of collecting and analysing production data, making it the perfect choice for high-performance industrial and research wafer processing.
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