Used STOELTING / TREK / WESTEK Triton 221 MIL #9267754 for sale

STOELTING / TREK / WESTEK Triton 221 MIL is a semiconductor wafer processing equipment designed to address a variety of wafer processing needs for complex device applications including both MEMS (microelectromechanical systems) and MEMS/CMOS (complementary metal-oxide-semiconductor) designs. TREK Triton 221 MIL is capable of both masking and etching of wafers up to full-size 8-inch/200 mm diameter and is a key part of a broad range of advanced technology development and production processes. WESTEK Triton 221 MIL is comprised of a main cabinet which houses the engine, power supply, and controller modules, and a chamber containing a custom-made vacuum system. It is equipped with a large-format robotic loader that can handle wafers up to 200 mm while providing superior accuracy and repeatability of movable components. Control of the unit is done through a PC interface with an "intuitive" graphical user interface (GUI) that provides easy access to all major machine functions. The tool also includes various integrated process options to facilitate a variety of semiconductor device processing needs. Triton 221 MIL offers exceptional performance with various etch options including reactive ion etching (RIE) and Deep Reactive Ion Etching (DRIE). These provide etching rates up to 1 micron/min at higher temperatures and higher precision (down to 1 Angstrom resolution). The etching process utilizes process gases and a fully programmable bias voltage for conformal etching, which enables the etching of complex shapes with superior uniformity. The optional masking resource, which is integrated with STOELTING Triton 221 MIL, is designed to enable efficient masking of wafers for both MEMS and MEMS/CMOS structures. It features an auto-align asset which can precisely align marking tools for consistent application of photoresist material. The masking model also includes a DVD auto-scraping capability which removes unwanted photoresist before etching. STOELTING / TREK / WESTEK Triton 221 MIL is designed for ultimate reliability with a range of safety sensors to detect shut-off conditions, as well as a chamber pressure monitoring equipment which will automatically shut the unit off if a set point is exceeded. The system also includes a maintenance program which can be scheduled or set to trigger alert messages at periodic intervals to ensure that the unit is kept in good working order. Overall, TREK Triton 221 MIL is an excellent choice as a semiconductor wafer processing machine, providing accurate and reliable etching and masking processes for complex device applications. The tool is easy to use and maintain, and the optional masking resource makes it an ideal choice for MEMS/CMOS development and production processes.