Used STOELTING / TREK / WESTEK Triton IV #9008264 for sale
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STOELTING / TREK / WESTEK Triton IV is a high quality, industrial-grade process equipment designed for wafer fabrication. This system is a fully automated, modular, and flexible solution for today's semiconductor wafer processing needs. TREK Triton IV can be used for chemical mechanical planarization (CMP), chemical vapor deposition (CVD), diffusion, etch, ion implantation, lithography, marinating, metrology, plasma/vacuum deposition, spin-on dielectrics, and wafer probing. In addition, this unit is designed to operate in an environment of up to cleanroom Class 1, making it suitable for demanding processes. WESTEK Triton IV features a powerful integrated control machine, which allows users to program and monitor the tool using the intuitive graphical user interface. The control asset is built on open standards, making it suitable for use with a wide variety of software packages. The integrated control model provides a comprehensive, step-by-step process flow control with actively managed process tracking. This ensures that the process parameters are accurately maintained throughout the process, allowing for highly reliable and repeatable results. This equipment also provides up to five programmable setpoints, which allow users to define the chemical and physical process conditions in order to optimize the process results. STOELTING Triton IV provides an array of environmental and system monitoring features. This includes a temperature-controlled environment, with selectable setpoints that can be adjusted depending upon the type of recipe being used. The unit also utilizes real-time process monitoring, with integrated gas sensing capabilities to allow users to customize the process conditions to match the application being used. In addition, Triton IV incorporates multiple safety features, including alarm systems and manual overrides, to ensure user safety in the event of unexpected process events. This machine is designed to accommodate a wide range of wafer sizes, ranging from 200mm up to 300mm. It is equipped with an internal vacuum manifold for full-wafer processing, or up to 12 individual process modules for split-wafer processing. The tool is also compatible with most standard process chambers, including load locks, pre-aligners, and post-aligners. Lastly, STOELTING / TREK / WESTEK Triton IV comes with a range of service and support packages, ensuring that users have the technical assistance they need when it comes to installation, operation, maintenance, and repair.
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