Used STOELTING / TREK / WESTEK Westkleen Formula 2RS3 #197438 for sale
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STOELTING / TREK / WESTEK Westkleen Formula 2RS3, often referred to as WestKleen is a wafer processing equipment designed by TREK, a manufacturer of high precision and reliable wafer processing equipment. WestKleen is designed to deliver maximum performance when used in wafer processing environments. The system utilizes advanced optical detection technology and a fixed-position, fed-batch cleaning process to thoroughly clean wafers in a single cycle. The complete two- step process allows the unit to clean increasingly complex semiconductor surface structures. A front-end operator control module provides a user-friendly graphical user interface for operating and monitoring the machine, making programming easy and efficient. WestKleen's fixed-position fed-batch cleaning process ensures reliable, repeatable wafer cleaning results, regardless of wafer geometry, by providing precise control of the chemical dispense and rinse systems. The chemical dispense tool is comprised of two precision metering pumps, two dispense lances, and a turret nozzle, which provide precise chemical injection during cleaning. Two independent, high-pressure rinse systems provide solvent delivery and rinse capability. The asset also features a proprietary optical detection model that continuously measures the cleaning status of each wafer. This equipment determines when each wafer is clean and can alert the operator if any wafers remain unclean even after additional chemical dispense or rinse cycles have been executed. The WestKleen also has a high-speed wafer transport system. It houses eight tubular wafer transport belts that carry multiple wafers at high speed to each station. The transport unit is designed to operate at up to 800 conditions/hour with a total transport time of less than 5 seconds per wafer. The WestKleen is also equipped with an advanced safety machine which includes sensors to detect any foreign objects and provides three-level security protection. The tool cannot be operated unless all protective covers are closed and all safety sensors are activated. TREK Westkleen Formula 2RS3 is a revolutionary wafer processing asset that provides a reliable, repeatable and precise cleaning process. It is designed to provide maximum performance and safety for wafer processing applications.
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