Used SWAGELOK SWS M100-1 #9076772 for sale

SWAGELOK SWS M100-1 is a precision automated wafer processing equipment designed to enable efficient handling of wafers up to 200mm. With a footprint of only 102x52cm and a total weight of 31kg, SWS M100-1 is easily configured to fit within existing clean-room layouts and integrate into automated production systems. The system features three 2D robotic pick and place heads, allowing for independent operation of each of the components, including wafer transfer, cassette mounting, wafer centering, and inspection. Additionally, the unit is equipped with an advanced process controller which allows for various process parameters to be independently adjusted to meet specific wafer performance requirements. Photoelectric sensors are used to detect when wafers are received or placed onto a target, while two integrated infrared built-in sensors detect the presence of a cassette for mounting or wafer for removal or placement. The detection of a cassette or wafer triggers the appropriate robot head to proceed with a process step, allowing for a seamless transition between various operations. SWAGELOK SWS M100-1 has a variable speed transport, allowing for speeds ranging from 0.5 to 30 meters/minute, depending on the cycle time and production demands. The robot arms have a maximum acceleration of 6m/s². In addition, the machine has a throughput of up to 70 wafers/minute. Incorporating proven mechanical components, as well as advanced motion and vision control systems, SWS M100-1 is designed to ensure smooth and accurate wafer processing. The robotic arms are configured with a special rail tool to ensure a precise movement and the vision asset is equipped with a wide-angle, high-resolution camera to ensure the best alignment and wafer centering. Furthermore, the sensors are sealed with an IP67 rating, which provides protection against dust and water damage. The easy-to-use software powered by the simple-to-operate engineering panel, provides operators with a user-friendly interface for setting parameters, as well as monitoring model status. The equipment is also equipped with an auto-diagnostic system designed to facilitate easy identification and resolution of potential issues. Designed with safety in mind, SWAGELOK SWS M100-1 includes various features to help protect the safety of the operator and environment, including audible and visual alarms for unit errors, self-diagnostics for mechanical components, push button emergency stop functionality, and an e-stop button for quick manual operation. In sum, SWS M100-1 is an advanced automated wafer processing machine that facilitates efficient handling of wafers up to 200mm. Featuring a robust mechanical and electronic design, this precision tool has been optimized for use in a wide variety of production settings to enable precise and reliable wafer processing.