Used VARIOUS Lot of spare parts #293822615 for sale
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ID: 293822615
Qty / Description
(1) Lock pin for heater, 300mm, P/N: 0200-06702
(1) Fixed floating wafer lift pin for heater, 300mm, P/N: 0200-06840
(2) Dual anti lift positing rings for heater, 300mm, P/N: 0200-06863
(1) Ceramic cover ring, P/N: 0200-06864
(1) Ceramic shield insulator for process chamber, 300mm, P/N: 0200-06869
(1) Purge ring with 0.010" gas gap for WxZ Heater, 300mm, P/N: 0200-07013
(1) ENDURA 2 Hot-Al deposition ring, P/N: 0200-07118
(1) Ceramic RF isolator for FEOL Process chamber, 300mm, P/N: 0200-07415
(1) Centering screw for purge heater, P/N: 0200-07418
(2) Ceramic deposition rings for BESC Chuck, 300mm, P/N: 0200-08301
(1) Fixed‑floating hoop for Producer SE Chamber, 300mm, P/N: 0200-08334
(1) Slit window for CVD Process chamber, P/N: 0200-09002
(1) Shield component, 200mm, P/N: 0200-09072
(2) Heated chamber windows, 200mm P/N: 0200-09074
(1) Adapter pump plate, narrow gap, nitride/WB, 200mm, P/N: 0200-09075
(1) AMT Quartz shield, 150mm, P/N: 0200-09083
(1) Shield 4-5-6 for BW Platform, P/N: 0200-09121
(1) Window heater for CVD Process chamber, P/N: 0200-09158
(1) Wafer lift pin for BW Platform, 200mm, P/N: 0200-09185
(2) Lower gas distribution plates, 8.5in OD, 8-Hole for ASP / PRSP, P/N: 0200-09201
(1) Slit‑type chamber window for PRSP Chamber, P/N: 0200-09441
(1) Quartz top cap for ASP / PRSP3 Tube, 25mm, P/N: 0200-09444
(1) Quartz upper chamber liner for PRSP3 Gas distribution, P/N: 0200-09445
(1) Quartz lower chamber liner for PRSP3 Gas distribution, P/N: 0200-09446
(2) Upper gas distribution plates for ASP / PRSP3, P/N: 0200-09478
(1) Ceramic clamp ring for JEIDA Major flat, 200mm, 1.38H, P/N: 0200-09674
(2) Heater lift pins for WxZ Heater, P/N: 0200-09716
(2) Ceramic pedestal covers, 150mm, P/N: 0200-09734
(1) Ceramic clamping ring, 150mm, P/N: 0200-09735
(1) Ceramic clamping ring, 200mm, P/N: 0200-09747
(1) Pedestal finger type shield, 150mm, P/N: 0200-09759
(1) Focus ring, 209mm ID, ESC, Lift-2 notch, 8", P/N: 0200-09787
(1) Focus ring, 230mm ID, 1.38H, notched, 8", P/N: 0200-09910
(1) Quartz Cover, stepped, lift-2, notched, ESC, 8", P/N: 0200-09911
(1) Wafer lift pin for heater, P/N: 0200-09933
(2) L‑support shields for pumping insert, P/N: 0200-09974
(1) Lift ring, 6", P/N: 0200-09999
(1) Inner ring with double-annulus, 1.5", SGD, P/N: 0200-10027
(1) Outer quartz cover, 8", step 3, ESC, P/N: 0200-10041
(2) Quartz simple cathode insulators, 200mm, P/N: 0200-10073
(1) Outer ring for SSGD, R2 Chamber, 1.5", P/N: 0200-10087
(1) Cover for plasma chuck, P/N: 0200-10110
(1) Arm for plasma chuck, 200mm, P/N: 0200-10117
(4) Arms for plasma chuck, 6", P/N: 0200-10118
(1) Isolator for pumping plate, DXZ, P/N: 0200-10144
(1) Ceramic liner, silicon nitride, DXZ , P/N: 0200-10160
(2) Enhanced silicon nitride isolators for pumping lid, DXZ GECO, P/N: 0200-10163
(1) Pumping insert shield, silicon nitride, DXZ, P/N: 0200-10164
(1) Edge cover plate, DXZ, P/N: 0200-10169
(1) Wafer lift pin, finger type, P/N: 0200-10203
(1) Quartz GDP uni-insert liner, 88-hole, P/N: 0200-10246
(1) Lift pin for heater, DXZ, P/N: 0200-10284
(1) Arm for plasma chuck, DCVD, 200mm, P/N: 0200-10287
(1) Plasma chuck compensator, DCVD, 200mm, P/N: 0200-10288
(1) Cathode base, DPS MEC, 150mm, P/N: 0200-10295
(1) Ceramic dome for DPS chamber, R1 rough KC, P/N: 0200-10324
(1) Ceramic heat shield, P/N: 0200-12079
(1) Quartz injection baffle, P/N: 0200-12367
(1) Notched lift pin counterweight, PECVD, 300mm, P/N: 0200-14279
(1) Notched lift pin, side 1, PECVD, 300mm, P/N: 0200-14280
(1) Notched lift pin, side 2, PECVD, 300mm, P/N: 0200-14281
(1) Keeper for notched lift pin, PECVD, 300mm, P/N: 0200-14283
(1) Ceramic insert for shadow ring placement, P/N: 0200-14553
(1) Locking pin for shadow ring insert, ACL, P/N: 0200-14576
(1) Backside shield S1, G-GT ACL, P/N: 0200-14626
(1) Backside shield S2, G-GT ACL, P/N: 0200-14627
(1) Isolator for output manifold to GB, aluminum oxide, P/N: 0200-14759
(1) Shadow ring, 0.8mm, EE type, minimum notch tab, P/N: 0200-14765
(1) Chamber isolator shield, SR, Producer G-GT, P/N: 0200-14770
(1) Aluminum oxide isolator, PPM, large electrode, P/N: 0200-14851
(1) Aluminum oxide isolator, PPM, large size, SR configuration, P/N: 0200-15179
(1) Clampless insulator for in‑situ temperature test, Ultima, HDPCVD, P/N: 0200-18090
(1) All‑ceramic HDPCVD process nozzle, 2.55L, 1.5% flow, P/N: 0200-18093
(1) CIP bottom purge baffle, P/N: 0200-18955
(1) -, P/N: 0200-20123
(1) Rigid coil support insulator, P/N: 0200-20169, 0200-00299
(2) Rigid coil support caps, P/N: 0200-20170
(1) Labyrinth for rigid coil support, Vectra IMP, P/N: 0200-20175
(1) Insert for double RF connector, Vectra IMP, P/N: 0200-20210
(2) Double RF connector housings, Vectra IMP, P/N: 0200-20215
(1) Cover pin for RF screw, Vectra IMP, P/N: 0200-20216
(1) Feedthrough coil support labyrinth, Vectra IMP, P/N: 0200-20217
(1) RF coil base for IMP RF match box, P/N: 0200-20218
(1) Pedestal cover, 8", B101 heater, ceramic, Vector IMP, P/N: 0200-20285-001
(1) Ceramic rest button, B101, P/N: 0200-20315
(1) Ceramic cover ring, 8", B101, 10.75" OD, P/N: 0200-20331
(1) Rigid support insulator, P/N: 0200-20492
(1) -, P/N: 0200-20521
(1) Edge ring, P/N: 0200-21163
(1) Titanium-tin insulator, P/N: 0200-26254
(1) Blade arm, aluminum oxide (Al2O3), P/N: 0200-35004
(2) Upper quartz domes, P/N: 0200-35007
(1) Window center finder, P/N: 0200-35008
(1) Upper quartz chamber liner, RP EPI, P/N: 0200-35017
(1) Quartz exhaust insert, P/N: 0200-35018
(1) Quartz injection insert, EPI, P/N: 0200-35019
(1) Lower quartz chamber liner, RP EPI, P/N: 0200-35023
(1) Upper quartz chamber liner, P/N: 0200-35024
(1) Lower liner (ATM), P/N: 0200-35065, 0200-35688
(1) Preheat ring, 8", P/N: 0200-35081, 0200-35022
(1) Upper dome (ATM), P/N: 0200-35084
(3) Gas feed housings, DPS MEC, P/N: 0200-35290
(2) Gas nozzle plugs, DPS MEC, P/N: 0200-35291
(1) Ceramic capture ring, 195mm, semi‑notch, P/N: 0200-35323
(2) Wafer lift shafts, 8", P/N: 0200-35424
(1) Insert rib, 5", P/N: 0200-35427
(1) Insert rib, 3", P/N: 0200-35428
(1) Resistive sleeve, P/N: 0200-35525
(2) Silicon insert rings, 150mm, flat, P/N: 0200-35623
(1) Edge ring, DXZ, P/N: 0200-35702
(1) Recessed endpoint window, 4mm aperture, P/N: 0200-35801
(1) Lift pin, 0.149" diameter, triangular, P/N: 0200-36373
(1) Heater cover plate, 6", DXZ, P/N: 0200-36629
(1) Heater cover plate, 8", DXZ, P/N: 0200-36630
(2) Aluminum nitride (AlN) cover plates, 8", DXZ, dimpled, P/N: 0200-36631
(2) Finger lift ring plates, 200mm, P/N: 0200-36649
(1) Ceramic isolator, Producer, 200mm, P/N: 0200-36666.
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