Used ACCUTHERM AW 810 #9185465 for sale
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ID: 9185465
Wafer Size: 2"-8"
Rapid thermal processing system, 2"-8"
Ramp up rate: 10°C to 120°C per/sec
Maximum rate: 200°C
Steady state duration: 0-300 sec/step
Steady state temperature range: 150°C - 1150°C
Maximum: 1250°C
ERP Pyrometer:
450-1250°C
With ±1°C accuracy
Thermocouple:
100-800°C
With ±0.5°C accuracy
Temperature:
Repeatability: ±0.5°C
Uniformity: ±8°C across an 8"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Main frame with wires
Pentium® class computer with LCD monitor, 17"
Mouse and standard keyboard
Aluminum oven chamber
With water cooling passages
Gold plating plates
Door plate with TC connection port
Oven control board
Main control board
Bottom and top heating with 27 (1.2kW) radiation heating lamp module
Isolated quartz tube:
Without pyrometer window
With pyrometer window
(4) Bank zones
Top: Front and rear
Bottom: Front and rear
Quartz tray: 5" to 8" Round wafer / Customized
Gas line with gas MFC with shut-off valve
T-Shape quartz with qualified K-type TC
Holder: 100°C-800°C temperature measurement
Thermocouple wires: (5)pcs
Option:
MFCs with gas control
Carrier / Susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top
Patented ERP pyrometer (400-1250°C)
Non-contact high temperature sensor
Chiller for ERP pyrometer
Single point for pyrometer calibration
Omega meter for pyrometer and thermocouple calibration
Shutt-off valve for quartz tube
Lamps cooling control
Spare parts
Type:
Atmospheric RTP RTA
Desktop
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(27) Lamps
(4) Lamp zones
Isolated quartz tube
Gold plating plates:
Top
Bottom
Front
Rear
Left
Right
Water cooled oven chamber
Substrate size, 8"
Substrate thickness: <10 mm
Substrate material:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800°C-1250°C
Temperature sensor: TC
Longest steady time @1000 °C: 10mins
Vacuum pressure control: No
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating / Customized
Option:
Temperature sensor: ERP
Omega meter: CL23A
Susceptor: Base and cover
Power:
3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 100
CE Marked.
ACCUTHERM AW 810 is an industrial-grade oven / furnace designed for a variety of industrial applications. This powerhouse of a furnace features features top-of-the-line construction built with robust steel and stainless steel, allowing it to take on demanding temperature applications with ease. The powerful burner technology, dual stage gas-fired heating equipment, and high velocity airflow deliver consistent and accurate temperatures for all types of industrial applications, including metal processing and forging. The thermal design of AW 810 is unmatched in its power and performance. The furnace features heavy-duty burner boxes for each chamber with an advanced modular design to reduce downtime. The burner combustion is powered by premium quality burners operating on natural or LP gas. The dual stage gas-fired system provides efficient and accurate temperature control within the furnace, constantly pushing the flames to ensure accurate heating. The interior chamber of ACCUTHERM AW 810 is designed to make the most of its high velocity, low pressure airflow unit. This is achieved through the use of a low profile aperture seal, which helps maintain an even temperature across the chamber. The fan-driven convection machine ensures that heat transfer is kept consistent when temperatures in the chamber reach extreme levels. The interior of AW 810 is covered with a protective S-type Hotwork baffle. This specialized baffle increases the thermal efficiency of the chamber by shielding the walls from hot temperatures, ensuring that the chamber maintains its temperature for an optimum duration. The thermal-resistant insulation helps reduce heat loss, maximizing energy efficiency. ACCUTHERM AW 810 is also equipped with a protective safety tool. The asset consists of an integrated high temperature safety switch to cut off power to the chamber and fans in the event of overheating. Additionally, the furnace is designed with a temperature limit control, stopping operation when temperatures reach unsafe levels. For post-treatment and heating applications, AW 810 is the ideal choice. With heavy-duty steel construction, double-walled chambers, and precision temperature controls, this powerful oven / furnace is the ideal solution for industrial applications that demand consistent, repeatable, and reliable heating and cooling processes. With durable construction and energy-efficient performance, ACCUTHERM AW 810 is the perfect choice for all your industrial application needs.
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