Used ACCUTHERM AW 810V #9185474 for sale
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ID: 9185474
Wafer Size: 2"-8"
Rapid thermal processing system, 2"-8"
Vacuum pressure: 50m Torr to 13 Torr / 13 Torr to 760 Torr
Ramp up rate: 10°C to 120°C per/sec
Maximum rate: 200°C
Steady state duration: 0-600 sec/step
Steady state temperature range: 150°C - 1150°C
Maximum: 1250°C
K-Type TC temperature accuracy: ±1°C
Thermocouple temperature accuracy: ±0.5°C
Temperature:
Repeatability: ±0.5°C
Uniformity: ±8°C across a 8"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Main frame with wires
Pentium® class computer with LCD monitor, 17"
Mouse and standard keyboard
Aluminum oven chamber
Water cooling passages
Door plate with TC connection port
Top and bottom quartz windows
Heating module with 28 (1.2kW) radiation lamps
(6) Bank zones control
Oven control board
Main control board
Quartz tray: 2-4" / 4-6" / 5-8" Round wafer
(2) Gas lines with gas MFC with shut-off valve
Main vacuum valve
Options:
Atmospheric process function
Vacuum pressure measurement and control function
Vacuum pump:
Mechanical
Dry
Multiple process gases
MFCs (Up to 4) with gas control board
K-Type TC assembly for high temperature
Carrier / Susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top
Omega meter thermocouple calibration
Shutt-off valve: Quartz tube
Lamps cooling control
Spare parts
Types:
Vacuum RTP RTA
Desktop
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(27) Lamps
(4) Lamp zones
Isolated quartz tube: No
Gold plating plates:
Top and bottom in lamp module only
Water cooled oven chamber
Substrate size, 8"
Substrate thickness: <10 mm
Substrate materials:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800-1250/1500°C
Temperature sensor: TC, Special TC
Longest steady time @1000°C: 10mins
Vacuum pressure control:
50m Torr-13 Torr (Option) / 10-6 Torr
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating
Susceptor size: 4, 5, 6, 8, 4X4”, 5X3”, 16X2”
Base pressure: 50m Tor / 10-6 Torr
Options:
Omega meter: CL23A
Process gas lines with MFCs: 2, 3
Atmospheric function
Susceptor: Base and cover
Power :
3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 100
CE Marked.
ACCUTHERM AW 810V furnace is a powerful, high-temperature oven/furnace designed to meet the needs of a range of advanced industrial processes and applications. AW 810V is a forced-convection oven, utilizing an air circulation method to ensure consistent, even temperatures throughout the work chamber. This results in rapid heating of large batches or large pieces and allows the efficient and accurate treatment of small to medium-sized batches. ACCUTHERM AW 810V is equipped with dual-shell low thermal mass construction. This allows the unit to operate at temperatures of up to 2500°F (1371°C), while maintaining an excellent power-to-temperature ratio. AW 810V also features an energy-saving design that maximizes equipment efficiency. By using a high-capacity heating element, the unit assures maximum power while still providing the user with quick recover times. The air flow in ACCUTHERM AW 810V is completely adjustable, allowing the user to regulate air speed to create the optimum thermal environment for the application. The interior chamber of AW 810V is constructed from high-grade aluminized steel. This ensures the utmost in homogeneity and uniformity of temperature while maintaining the integrity of the material being processed. The oven comes with an adjustable shelf system that allows the user to customize the oven's interior configuration. ACCUTHERM AW 810V is designed with a robust door assembly and a unique-seal unit that reduce energy waste and ensure the oven's integrity. AW 810V features a range of user-friendly control systems, such as digital display, timer, and temperature sweep. The temperature control machine provides accurate temperature control and is fully programmable, allowing the user to precisely reproduce temperature profiles. The user can also utilize the timer control for easy scheduling of activities and the temperature sweep for rapid, simultaneous heating of different parts. In addition to ACCUTHERM AW 810V's many features, it also includes a number of safety features. AW 810V is UL- and CE-approved and includes a host of safety measures to protect personnel, equipment, and the materials being processed. These safety features include an over-temperature control relay, a high-temperature alarm tool, and emergency shutoff. ACCUTHERM AW 810V is the perfect solution for a variety of industrial applications that require high-performance, reliable ovens or furnaces. With its efficient heating capabilities and advanced safety features, AW 810V is an excellent choice for users in need of an efficient, reliable, and cost-effective oven or furnace.
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