Used ACCUTHERM AW 820V #9185477 for sale
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ID: 9185477
Wafer Size: 2"-8"
Rapid thermal processing system, 2"-8"
Vacuum pressure: 50m Torr to 13 Torr / 13 Torr to 760 Torr
Ramp up rate: 10°C to 120°C per/sec
Maximum rate: 200°C
Steady state duration: 0-600 sec/step
Steady state temperature range: 150°C - 1150°C
Maximum: 1250°C
K-Type TC temperature accuracy: ±1°C
Thermocouple temperature accuracy: ±0.5°C
Temperature:
Repeatability: ±0.5°C
Uniformity: ±8°C across a 8"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Main frame with wires
Pentium® class computer with touch screen monitor, 15"
Mouse and standard keyboard
Aluminum oven chamber
Water cooling passages
Door plate with TC connection port
Top and bottom quartz windows
Heating module with 27 (1.2kW) radiation lamps
(4) Bank zones
Top: Front and rear
Bottom: Front and rear
Oven control board
Main control board
Quartz tray: 5"-8" Round wafer
(2) Gas lines with gas MFCs with shut-off valve
Main vacuum valve
Options:
Atmospheric process function
Vacuum pressure measurement and control function
Turbo pump for up to 10-6 Torr
Vacuum pump:
Mechanical
Dry
Multiple process gases
MFCs (Up to 4) with gas control board
K-Type TC assembly for high temperature
Carrier / Susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top
Omega meter thermocouple calibration
Shutt-off valve for quartz tube
Lamps cooling control
Spare parts
Type:
Vacuum RTP RTA
Stand alone
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(27) Lamps
(4) Lamp zones
Isolated quartz tube: No
Gold plating plates:
Top and bottom in lamp module only
Water cooled oven chamber
Substrate size, 8"
Substrate thickness: <10 mm
Substrate materials:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800-1250/1500°C
Temperature sensor: TC, Special TC
Longest steady time @1000 °C: 30 mins
Vacuum pressure control:
50m Torr to 13 torr (Option) / 10-6 Torr
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating / Customized
Susceptor size: 4, 5, 6, 8, 4"x 4”, 5" x 3”, 16" x 2”
Base pressure: 50m Tor / 10-6 Torr
Options:
Omega meter: CL23A
Process gas lines with MFCs: 2, 3, 4, 5
Atmospheric function
Susceptor: Base and cover
Power :
3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 100
CE Marked.
ACCUTHERM AW 820V is a high-performance industrial oven and furnace used for a wide variety of heat processing and drying applications. The furnace is available in six standard sizes to accommodate products of various sizes and shapes within a production cycle. AW 820V is a highly reliable and efficient furnace equipment, equipped with ACCUTHERM advanced burner and control system. The temperature range is from ambient to 850°C, with extremely accurate and stable temperature stability (± 1.5°C or better). It is also capable of intermittent operation - allowing the end-user to turn on the unit when needed, and turn it off when not in use. The furnace is designed to be easy to operate, with intuitive user interfaces and monitoring equipment, such as a touch screen LCD display and PLC controller. The furnace also features a self-diagnostic machine which detects any problems, thus providing a quick response to alarm conditions. ACCUTHERM advanced burner tool enables precise temperature control and output by continuously adjusting flame geometry and exhaust air pressure. Also, the furnace is equipped with an energy saving feature, which reduces fuel consumption and improves efficiency. ACCUTHERM AW 820V furnace is designed for the safe handling of hazardous materials during heat processing. The asset is equipped with a wide range of safety features including an automatic and manual shut-off switches, smoke detectors, and an emergency shut-off switch if there is a danger of explosion. AW 820V furnace is a highly efficient and reliable model for a wide variety of industrial heat processing and drying applications. It is designed for maximum safety and ease-of-operation, and comes with an advanced burner and control equipment for precise heat output and temperature stability. It also features an energy saving mode and additional safety features for the safe handling of hazardous materials.
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