Used ACCUTHERMO AW 410 #9185454 for sale
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ID: 9185454
Wafer Size: 2"-4"
Rapid thermal processing system, 2"-4"
Main frame with wires
Pentium® class computer with LCD monitor, 17"
Mouse and standard keyboard
Aluminum oven chamber
Water cooling passages
Gold plating plates
Door plate with one TC connection port
Oven control board
Main control board
Bottom and top heating with 17 (1.5 kW) radiation heating lamp module
Isolated quartz tube:
Without pyrometer window
With pyrometer window
(4) Bank zones:
Top: Front and rear
Bottom: Front and rear
Quartz tray: 2"- 4" Round wafer
Gas line with gas MFC without shut-off valve
T-Shaped quartz with qualified K type TC
Holder: 100°C - 800°C Temperature measurement
Thermocouple wires: (5) Pcs
Specifications:
Ramp up rate: 10°C to 120°C/sec
Maximum rate: 200°C
Steady state duration: 0-300 sec/step
ERP Pyrometer: 450-1250°C
With ±1°C accuracy
Thermocouple: 100-800±0.5°C
With ±0.5°C accuracy
Temperature:
Repeatability: ±0.5°C
Uniformity: ±5°C across, 4"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Options:
Patented ERP pyrometer: 400-1250°C
MFCs With extended gas box
Gas control board
Carrier / Suspector for small sample
Transparent substrate
Substrate with metal thin film on top
Non-Contact high temperature sensor
Chiller: ERP Pyrometer
Pyrometer calibration:
Single point
Omega meter CL23A
Thermocouple calibration
Shut-off valve: Quartz tube
Lamps cooling control
Spare parts
Type:
Atmospheric RTP RTA
Desktop
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(17) Lamps
(4) Lamp zones
Isolated quartz tube
Gold plating plates:
Top
Bottom
Front
Rear
Left
Right
Water cooled oven chamber
Substrate size, 4"
Substrate thickness: <7 mm
Substrate material:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800-1250°C
Temperature sensor: TC
Longest steady time @1000 °C: 5 Mins
Vacuum pressure control: No
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
35 to 50 psi (2.5 to 3.5 kg/cm2)
Pre-filtered water
Susceptor material: Graphite with SiC coating / Customized
Options:
Temperature sensor: ERP
Susceptor: Base and cover
Gas line: 1
Dimension: 17”x18”x11” (DXWXH)
Gas line: 2 tot 4
Dimension: 17”x26”x11” (DXWXH)
Gas line: 5 to 6
Dimension: 17”x30”x11” (DXWXH)
Power :
3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 60
CE Marked.
ACCUTHERMO AW 410 is an oven or furnace designed for maximum safety, reliability, and efficiency. This furnace offers a wide range of features, which provide for precise control of the heating process and protective thermal functions. The unit features a robust chamber and insulation design that ensures maximum heat retention for reliable heating performance. It also has a powerful and adjustable fan equipment for even heat transfer throughout the chamber. The temperature controller features a PID-based programmable logic that provides precise control of the heating process. The controller offers the user adjustable programs that can be used for preheating, holding, ramping and many other process functions. It also provides adjustable temperature overshoot or undershoot alarms, which helps the user keep an eye on the process and ensure accurate temperature control. AW 410 also features an adjustable air distribution system. The unit helps to improve heating uniformity by directly adjusting the air speed and primary air distribution. This ensures that the heat is transferred evenly across the oven chamber. The air flow machine also helps to reduce excess fuel consumption or window overheating in the chamber. The furnace is outfitted with a number of protective elements designed to ensure operational safety. The interior is outfitted with a high temperature insulation cover, as well as an adjustable door baffle. These features help to reduce metal exposure to direct heat or flame. The interior is also outfitted with recessed handle heaters and adjustable switches to ensure easier operation and enhanced safety. ACCUTHERMO AW 410 is designed for use in industrial and laboratory settings. The furnace can be used for a variety of heat-treating jobs, such as sintering, tempering, hardening, and almost any other type of thermal process. The furnace has the capability of reaching maximum temperatures of 2010°C, with an accuracy of ±3°C. The furnace is designed with optimal thermal insulation, and is constructed using heavy-duty steel and ceramic components, ensuring long lasting performance and reliability.
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