Used ACCUTHERMO AW 610 #9185462 for sale

ID#: 9185462

Manufacturer:

ACCUTHERMO

Model:

AW 610

Wafer Size:

2"- 6"

Equipment Details:

Rapid thermal processing system, 2"-6"

Main frame with wires
Pentium® class computer with LCD monitor, 17"
Mouse and standard keyboard
Aluminum oven chamber
Water cooling passages
Gold plating plates
Door plate with TC connection port
Isolated quartz tube without pyrometer window / with pyrometer window
Oven control board
Main control board
Bottom and top heating with 21 (1.2kW) radiation heating lamp module

(4) Bank zones:
Top: Front and rear
Bottom: Front and rear

Quartz tray: 4" to 6" Round wafer / Customized
Gas line with gas MFC without shut-off valve
T-Shape quartz with qualified K-type TC
Holder: 100°C-800°C Temperature measurement
Thermocouple wires: (5) pcs


Ramp up rate: 10°C to 120°C/sec
Maximum rate: 200°C
Steady state duration: 0-300 sec/step
Ramp down rate: 10°C to 200°C/sec
Steady state temperature range: 150°C - 1150°C
Maximum: 1250°C
ERP Pyrometer: 450-1250°C
With ±1°C accuracy
Thermocouple: 100-800°C
with ±0.5°C accuracy
Temperature:
Repeatability: ±0.5°C
Uniformity: ±5°C across, 6"

Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2

Options:
MFCs with extended gas
Box and gas control board

Carrier or susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top

Patented ERP pyrometer (400-1250°C)
Non-contact high temperature sensor
Chiller for ERP pyrometer
Single point for pyrometer calibration
Omega meter for pyrometer and thermocouple calibration
Shutt-off valve for quartz tube
Lamps cooling control
Spare parts

Type:
Atmospheric RTP RTA
Desktop
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom

(21) Lamps
(4) Lamp zones: 3 Phase
(2) Lamp zones: 1 Phase

Isolated quartz tube

Gold plating plates:
Top
Bottom
Front
Rear
Left
Right

Water cooled oven chamber
Substrate size, 6"
Substrate thickness: <7 mm

Substrate material:
Transparent
Semitransparent
Nontransparent

Substrate shape: Round / Square / Abnormity
Highest temperature: 800-1250°C
Temperature sensor: TC
Longest steady time @1000°C: 5mins
Vacuum pressure control: No

Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating / Customized

Options:
Temperature sensor: ERP
Omega meter: CL23A
Susceptor: Base and cover

Gas line: 1
Dimension: 17”x18”x11” (DXWXH)

Gas line: 2 tot 4
Dimension: 17”x26”x11” (DXWXH)

Gas line: 5 to 6
Dimension: 17”x30”x11” (DXWXH)

Power :
1 Phase / 3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 70 / 100
CE Marked.
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