Used ACCUTHERMO AW 610 #9185462 for sale
URL successfully copied!
ID: 9185462
Wafer Size: 2"- 6"
Rapid thermal processing system, 2"-6"
Main frame with wires
Pentium® class computer with LCD monitor, 17"
Mouse and standard keyboard
Aluminum oven chamber
Water cooling passages
Gold plating plates
Door plate with TC connection port
Isolated quartz tube without pyrometer window / with pyrometer window
Oven control board
Main control board
Bottom and top heating with 21 (1.2kW) radiation heating lamp module
(4) Bank zones:
Top: Front and rear
Bottom: Front and rear
Quartz tray: 4" to 6" Round wafer / Customized
Gas line with gas MFC without shut-off valve
T-Shape quartz with qualified K-type TC
Holder: 100°C-800°C Temperature measurement
Thermocouple wires: (5) pcs
Ramp up rate: 10°C to 120°C/sec
Maximum rate: 200°C
Steady state duration: 0-300 sec/step
Ramp down rate: 10°C to 200°C/sec
Steady state temperature range: 150°C - 1150°C
Maximum: 1250°C
ERP Pyrometer: 450-1250°C
With ±1°C accuracy
Thermocouple: 100-800°C
with ±0.5°C accuracy
Temperature:
Repeatability: ±0.5°C
Uniformity: ±5°C across, 6"
Gases used:
N2
O2
Ar
He
Forming gas
NH3
N2O2
Options:
MFCs with extended gas
Box and gas control board
Carrier or susceptor:
Small sample
Transparent substrate
Substrate with metal thin film on top
Patented ERP pyrometer (400-1250°C)
Non-contact high temperature sensor
Chiller for ERP pyrometer
Single point for pyrometer calibration
Omega meter for pyrometer and thermocouple calibration
Shutt-off valve for quartz tube
Lamps cooling control
Spare parts
Type:
Atmospheric RTP RTA
Desktop
Manual loading
PC Controller with real time control technology
Lamp heating: Top and bottom
(21) Lamps
(4) Lamp zones: 3 Phase
(2) Lamp zones: 1 Phase
Isolated quartz tube
Gold plating plates:
Top
Bottom
Front
Rear
Left
Right
Water cooled oven chamber
Substrate size, 6"
Substrate thickness: <7 mm
Substrate material:
Transparent
Semitransparent
Nontransparent
Substrate shape: Round / Square / Abnormity
Highest temperature: 800-1250°C
Temperature sensor: TC
Longest steady time @1000°C: 5mins
Vacuum pressure control: No
Chamber cooling:
Maximum: 35°C
Dew point: 3°C
Pre-filtered water
Susceptor material: Graphite with SiC coating / Customized
Options:
Temperature sensor: ERP
Omega meter: CL23A
Susceptor: Base and cover
Gas line: 1
Dimension: 17”x18”x11” (DXWXH)
Gas line: 2 tot 4
Dimension: 17”x26”x11” (DXWXH)
Gas line: 5 to 6
Dimension: 17”x30”x11” (DXWXH)
Power :
1 Phase / 3 Phase
50/60 Hz
AC 200V, 208V, 220V, 380V, 415V
Amps: 70 / 100
CE Marked.
ACCUTHERMO AW 610 is an electric oven/furnace designed for high temperature heat treatment and laboratory applications. The equipment is suitable for preheating, annealing, tempering and similar operations in a variety of materials and components. AW 610 is capable of heating up to a temperature of 1100°C and is capable of accurately controlling the temperature of the process, up to a set point currently programmed or manually adjusted by the user. It also features two independent heating elements for inert as well as oxidizing atmospheres. ACCUTHERMO AW 610 features a high quality stainless steel inner chamber with two sides of refractory material that absorb heat and protect the heating elements. The chamber has two hinged doors, the inner door being easily removed for easy loading and unloading of the material to be treated. AW 610 is constructed to provide maximum safety to the user and the chamber. It is fitted with over-temperature protection, with the reset button at the front of the furnace. It also has two limit switches, one at the lower and the second at the upper level of the chamber, which will stop the heaters in case of over-temperature or low-level conditions. This oven/furnace also has an advanced control system, which includes a touch screen LCD display for easy access to all controls and settings. It can be programmed according to the working temperature, atmosphere, dwell time and other parameters. The other features include force cooling, vacuum pump, interlock system and safety lock. ACCUTHERMO AW 610 is a versatile and reliable piece of equipment, making it suitable for use in the laboratory, research and applications in specific industries. The highly efficient and accurate temperature control system ensures excellent and reproducible results in all conditions. The equipment is also reasonably priced and comes with a one year warranty.
There are no reviews yet