Used THERMAL TECHNOLOGY SAS-2000 #293597792 for sale
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ID: 293597792
Vintage: 2014
High temperature furnaces
Heating system power leads: Water cooled 350 MCM Size
Operating temperature: 2200°C
Hot zone operating temperature uniformity: ±2°C
Maximum change weight: 1000 Ibs
Vacuum level: 10 Torr
Horizontal
Front loading with motorized hinge front door
Automatic pneumatic clamping
Manual opening rear door
System frame / mezzanine suitable for clean room integration
Double wall water cooled stainless steel chamber
Doors and pump line
Metal shielded hot zone: Tungsten / Molybdenum shields
Diffusion pumped, 10"
With mechanical roughing pump
Water cooled inlet baffle
Technical:
Chamber materials:
304 L
Polished interior surfaces
Chamber ports:
Electrode ports: 24 on chamber, 3 on each door
Thermocouple and spare:
(18) NW16 on chamber
(2) Door
NW40 on pump line
Heaters: Tungsten mesh panels
Hot zone effective size: 16" x 16" x 36" (5+ cu ft)
Control system: Siemens PLC based
Heating zones:
(6) Top
bottom
(2) Sides
(2) Ends
Safety, Alarms, Interlocks:
Vacuum
Water flow
Air pressure
Over temperature
Single enclosure:
(4) 70 KVA transformers
(2) 35 KVA transformers
Thermocouples:
(6) Types C Control
Type C Over temperature
Vacuum gauge:
1000 Torr
Cold
Pump down (Clean and dry chamber):
45 Minutes to 5 m torr
Gas system:
(3) Circuits: Nitrogen
Argon
Hydrogen
With mass flow controller, VCR Connection
Cooling water circuit:
(24) Active
(3) Spares
With flow and temperature monitoring
Top zone 70 kVA with 10 and 12 volt taps
Bottom zone 70 kVA with 10 and 12 volt taps
Left zone 70 kVA with 18 and 21 volt taps
Right zone 70 kVA with 18 and 21 volt taps
Front zone 35 kVA with 15 and 18 volt taps
Rear zone 35 kVA With 15 and 18 Volt taps
UPS For emergency shutdown: 24 VDC, 20 A.
Diffusion pump power supply: 230 VAC, Single phase, 20 A
Mechanical pump power supply: 230 VDC, 3 phase, 10 A
Power supply: 350 kVA, 3 Phase, 6 Zone.
2014 vintage.
THERMAL TECHNOLOGY SAS-2000 is a Next Generation Chamber Oven/Furnace offering unmatched versatility for Ceramics and Semiconductor applications. It provides uniform thermal heating up to 2000°C and features a unique air-cooling equipment that allows rapid cooling with minimal thermal stress. The oven/furnace has a specially designed chamber which provides uniform thermal distribution across the whole temperature isothermal profile. This ensures that each sample is heated with precise temperature control, minimizing sample thermal stress while optimizing process results. Additionally, precise zoning is available to effectively control discrete zones of temperature to match precise needs across each application. SAS-2000 features precise controller with advanced PID control, which ensures accurate and stable process control throughout the extended temperature range. THERMAL TECHNOLOGY SAS-2000 also offers a unique air-cooling system to effectively reduce thermal shock and extend the life of sensitive components. The air-cooling unit design is composed of air-cooled blower with adjustable temperature controls to provide precise temperature control and precise cooling rate. SAS-2000 oven/furnace also has an array of heating elements that can be pre-set for various applications, such as batch Tempering, Hi-temperature Annealing, Metal Alloying and many more. The heating elements are designed with a special proprietary machine that ensures maximum uniform heating and precise thermal control. The heating elements have also been designed to resist oxidation to allow for extended oven/furnace up time. THERMAL TECHNOLOGY SAS-2000 has an integrated advanced user interface that provides a comprehensive real-time display and control of process parameters. This advanced interface allows users to configure the oven/furnace and the PID process parameters to the specific needs of their application. It also provides an integrated auto-tuning feature which enables easy and precise adjustment of oven/furnace settings. Overall, SAS-2000 gives users unparalleled performance and versatility while offering precise control and performance. This oven/furnace excels in providing excellent uniform thermal distribution, accurate control of temperature and cooling as well as flexible temperature regulation. With built-in advanced user interface and advanced PID control, THERMAL TECHNOLOGY SAS-2000 allows for precise and reliable application results.
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