Used AXCELIS / FUSION 200 PCU #9238497 for sale

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ID: 9238497
Wafer Size: 8"
DUV Photo stabilizer, 8".
AXCELIS / FUSION 200 PCU is an advanced exposure equipment designed for use in the semiconductor industry. The system offers precise control over critical exposure parameters for high-quality production results. It is designed for fast processing of wafers, layers, and samples and enables precise control over critical parameters such as magnification, focus, dose, and energy. The unit features an integrated motorized control machine and a motorized sample holding tool which provide precise control over sample alignment and handling, allowing for quick turnarounds while minimizing process related issues. Through its high throughput, precise sample positioning, and accurate dose measurement and control, the asset helps to ensure a reliable, repeatable process. FUSION 200 PCU has many automated features such as automated wafer and sample loading and alignment routines, dose control routines, and automated data acquisition and analysis routines. These features allow the user to better control critical process variables and customize the model for their application. The equipment can handle a wide range of wafer and sample sizes, from 4-inch to 1 micron. It also has the capability to process samples on both the top and bottom surfaces. The system offers a robust performance, providing fast processing times and accurate results. Additionally, its software allows for easy integration of systems for automated wafer or sample handling and alignment. AXCELIS 200PCU is designed to be used with a variety of exposure sources such as electrons, X-rays, visible light, and ion beams. The unit can handle synchronous exposures, allowing users to process multiple layers at once. The machine includes a multi-axis sample positioning tool which provides accuracy and repeatability, allowing the user to precisely position their samples during the exposure process. The asset is also designed with safety features to protect users. It has a low-power safety switch which will shut down the model when a power surge is detected, as well as an emergency stop switch which can shut down the equipment quickly if needed. Overall, AXCELIS / FUSION 200PCU is an advanced exposure system that offers precise control over critical parameters while helping minimize process related issues. Its high throughput and accurate data acquisition and analysis routines make it a great tool for the semiconductor industry.
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