Used TEL / TOKYO ELECTRON Alpha 808SD #9154804 for sale

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TEL / TOKYO ELECTRON Alpha 808SD
Sold
ID: 9154804
Wafer Size: 8"
Vintage: 1995
Systems, 8" 1995 vintage.
TEL / TOKYO ELECTRON Alpha 808SD is an advanced diffusion furnace and accessories package used by semiconductor manufacturers for their most advanced technology applications. TEL Alpha 808SD includes a diffusion furnace with high temperature control and a wide range of high-precision process monitoring and control instruments and accessories for instantaneous thermocouple temperature uniformity and profile control. TOKYO ELECTRON ALPHA 808 SD diffusion furnace has a temperature range from 20°C to 1100°C, making it suitable for various diffusions and deposition processes. It features a rapid thermal ramp rate of 50°C/sec and cooling rate of 25°C/sec providing highly efficient operation and reliable production. The diffusion furnace also uses advanced processes to achieve impressive pumping capabilities, allowing for a maximum of 50 mbar of vacuum. Alpha 808SD also includes a range of accessories including a mass-flow controller, a gas line manifold and adapter, a gas shut-off valve, a chiller, coolant tank, and a heat exchanger, as well as heat-resistant gloves and parts. With these accessories, TEL ALPHA 808 SD is designed to give excellent process control and temperature uniformity. ALPHA 808 SD also offers enhanced safety, featuring a Fire Shield Fume Hood to capture and remove hazardous fumes and gases from the workspace, as well as a Flame Arrestor for fire prevention, and an Overpressure Valve for process pressure control. Finally, TEL / TOKYO ELECTRON ALPHA 808 SD includes a PC-based program for EPMA (electron probe microanalysis) for analysis of any samples with a high degree of accuracy, including elements such as carbon, silicon, copper, and aluminum. This type of analysis is often used to determine the exact composition or purity of a sample. Overall, TOKYO ELECTRON Alpha 808SD is an advanced and customizable diffusion furnace accessory package designed to provide semiconductor manufacturers with unmatched process control, temperature uniformity and safety.
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