Used ADVANCED ENERGY / MKS FI80133 #293601250 for sale

ID: 293601250
Remote Plasma Source (RPS).
ADVANCED ENERGY / MKS FI80133 is a technologically advanced low-noise power supply designed for thin-film deposition processes such as PECVD and sputtering. The device has a wide voltage and current range of 0-800v and 0-4000A, making it an excellent choice for producing the precise and reliable power needed to create high quality thin-films. The power supply also has a wide range of benefits including low noise (under 3mV), fast rise times (less than 500µs), high stability and accuracy, and adjustable pulse and burst functions. MKS FI80133 is equipped with protection against over- and under-voltage, overcurrent faults, and rapid shutdown. This ensures safe operation and added reliability when using the power supply. Advanced user interface functions are also included and accessible via a 4.3 inch color touch-screen display. This enables users to customize performance parameters for specific processes and quickly monitor performance. An internal PC store is also included for logging alarm status, date and time, as well as generating commands to the power supply itself. The unit has a high power factor of greater than 0.99, making it an especially efficient provider of electricity. It also has a low voltage input design and is equipped with fast-reacting, low-voltage power trim control to minimize total harmonic distortion and maximize performance. In addition, the power supply has a highly efficient cooling system with a temperature range of 0°C to +50°C and a maximum relative humidity of 80%. In summary, ADVANCED ENERGY FI80133 is a highly advanced, reliable and efficient power supply that is specifically designed for thin-film deposition processes. It is equipped with multiple user interface functions, high power factor, rapid shutdown protection, temperature range control and much more.
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