Used ADVANCED ENERGY RF 30S #9111631 for sale

ADVANCED ENERGY RF 30S
ID: 9111631
RF Generators P/N: 3050017-013, 7520758057.
ADVANCED ENERGY RF 30S is a power supply that provides constant and stable RF (Radio Frequency) power necessary for many manufacturing processes, such as plasma etching and thin film deposition. It is designed to be reliable and to operate in high performance applications with a constant output potential. Equipped with an output voltage range from 4 to 15 KV, a peak current up to 350 µA, and a maximum input power of 800 W, ADVANCED ENERGY RF30S can provide the high degree of power necessary for many applications. RF-30S power supply also offers a wide range of protections. It has an integrated equipment to detect arcs and flashes, with an optional gas flow monitor system for continual monitoring of the process chamber. As well, it is equipped with advanced biasing control for improved film integrity and process repeatability on complex geometries. The voltage ramp and user selectable soft start times provide a safe and gradual return to full peak current after shutdown. ADVANCED ENERGY RF 30 S is also equipped with advanced features that provide more control and customization over the parameters of the process. With an adjustable frequency range of 13 - 70 MHz, maximum power up to 800 W, programmable automatic tuning, adjustable pulse length and pulse on time enabling short pulse operation, as well as a slew rate programmable from 0.1 - 6 V/µsec, users have greater control over the power delivered to the process chamber. RF 30 S power supply also has built in over temperature and over voltage protection, and an alarm unit for easy fault detection and troubleshooting. It is compatible with Windows-based software, allowing full control over the machine with one simple user interface. ADVANCED ENERGY RF-30S also has a large color LCD display which allows complete control of the parameters and allows for the display of graphical trends if needed. Overall, RF 30S is an excellent choice for power supplies in industrial applications. Its reliable performance, advanced feature options, and range of safety features make it an ideal choice for many manufacturing processes.
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