Used LAM RESEARCH 853-15130-002 #119671 for sale
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LAM RESEARCH 853-15130-002 is a high performance power supply specifically designed for applications in the semiconductor industry. 853-15130-002 is a 3-phase, 230V AC/ 50V DC unit powered by a PFC Class VI switched-mode rectifier and LAM's proprietary power factor correction (PFC) algorithm, ensuring reliable and efficient power delivery. It is designed to meet the rigorous demands of photolithography applications such as wafer etch and deposition. The power supply features a wide input voltage range to reduce the risk of downtime due to intermittent power supply voltage fluctuations. Additionally, the power supply is designed to protect against over-voltage, over-current and over-temperature conditions as well as provide overload protection and remote power control. The LAM LAM RESEARCH 853-15130-002 boasts a power factor correction (PFC) algorithm that increases the efficiency of the power delivery. This enables more power to be delivered with less current drawn from the grid, for a more cost-effective operation. The built-in temperature management system helps to ensure the longevity of the unit by keeping it cool during operation. 853-15130-002 offers a wide array of diagnostic functions and alarms. All of these features can be monitored and controlled via a Control Interface Module (CIM) or an Ethernet port. In addition, the remote power control capabilities allow users to configure the power supply to specific operating parameters, further optimizing its performance. All in all, LAM RESEARCH 853-15130-002 is a robust, reliable power supply that provides safe, efficient and cost-effective power delivery for demanding semiconductor manufacturing applications. Its wide range of features, programmable functions and diagnostic capabilities make it an ideal choice for industrial and research applications.
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