Used LAM RESEARCH 9400 DFM #9207998 for sale

LAM RESEARCH 9400 DFM is an etcher/asher specifically designed to meet the challenging demands of advanced wafer fabrication requirements. This equipment is capable of a wide range of traditional dry and wet etching processes, as well as new etch/crystal growth and chemical mechanical polishing processes. The system features advanced process control software and a state-of-the-art optics package that offers superior productivity and quality performance for high-end wafer processing. The unit is capable of etching and ashing features down to submicron sizes and complex structures in both planar and 3D wafer dimensions. Dual delivery systems allow for enhanced throughput and user flexibility. The machine also offers thermal management capabilities, with its advanced temperature control and heat removal technologies. 9400 DFM comes with a variety of modules, such as the high pressure transducer module that is specifically designed for enhancing thin film deposition. It also features a high temperature deposition module that provides precise control over rapid thermal processing. Ashers such as the three-chamber metal asher have automated loading/unloading capability for a fully automated operation. LAM RESEARCH 9400 DFM features a range of advanced process-monitoring capabilities such as reflectometer monitoring (RPM) and laser interferometry. This advanced digital tool continuously monitors etch depth and temperature to ensure optimal process control. In addition, it includes specialized control systems to monitor production data or trigger alarms for potential process errors. The asset also features a layer metrology model that provides detailed defect analysis of expanded gate structures and photoresist layer thickness. 9400 DFM also offers advanced tracking technology that includes a particle detection equipment to monitor and filter particulate and contaminant levels. This leads to improved yield and process results. The system is designed for optimal metrology, with its integrated control panel permitting manual operation for increased flexibility. LAM RESEARCH 9400 DFM is a versatile etcher/asher capable of handling a wide variety of advanced etching requirements for high-precision fabrication processes. This unit features advanced process control features and automated modules that offer excellent productivity and quality performance in semiconductor processing. Additionally, its advanced monitoring capabilities ensure superior process control and yield results.