Used SEMITOOL STI-15A-60V-4-AW #9351299 for sale
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SEMITOOL STI-15A-60V-4-AW photoresist equipment is an innovative tool designed to provide a reliable, specialized, and highly accurate photonic etching solution for integrated circuit (IC) fabrication. This automated system pairs a high-voltage power supply and a software-controlled etching tool which use a series of different etch techniques to produce a uniform dielectric layer over a wafer of any given size with the highest accuracy and repeatability in the industry. STI-15A-60V-4-AW unit uses a combination of advanced wet processing and dry etching to ensure the most accurate etching possible for each application. First, a chemical agglutinate is applied to the wafer, which facilitates adhesion of the photoresist material. The wafer is then exposed to a constant high-voltage to induce photochemical reactions in the photoresist material. Once the photoresist has been exposed to the voltage, the wafer is processed via an advanced wet-etching method that relies on ultra-pure chemical baths. The etching process is optimized to account for differences in etch rates due to different wafer sizes. Next, dry etching is used to finish the etching process and create the final dielectric layer. This dry etch process utilizes digitalized version of intense plasma to swiftly and intelligently etch the dielectric with accuracy of up to one tenth of a micron. The close tolerances between the etch depth and the desired dielectric thickness allows for near-perfect production runs. Lastly, the etched surface is cleaned and prepared for further processing. The softwares controlling the behavior of SEMITOOL STI-15A-60V-4-AW machine offer precise control over parameters like etch times, voltage, and temperature as well as the input of Masks into the tool. In addition, the integrated error-correction algorithms help reduce problems caused by misalignments both natural and caused by human error, and the intuitive and streamlined graphical user interface allows for easy operation and efficient production. All in all, STI-15A-60V-4-AW photoresist asset provides superior precision and repeatable accuracy for the production of dielectric layers over varying sizes of wafer substrates. The combination of wet-etching and dry-etching allows for greater control over the process, and the integrated software and graphical user interface provide the convenience and flexibility necessary to facilitate a successful production run.
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