Used ACCRETECH / TSK APM-90A #9236077 for sale

ACCRETECH / TSK APM-90A prober is a versatile and highly accurate probing equipment used in the front-end semiconductor and optoelectronics industry. It is designed to provide rapid and precise measurements of small device features and to control the alignment process of precision wafer-level components. The system is built on a series of lightweight aluminum bases that hold up to 7 axes, including an independently driven x-y-θ (θ is the angular position) stage, two focus stages, an ASU (an automated stage unit), and two contact probes. Each stage has a range of +/- 8.8 mm, a maximum speed of 10 mm/s, a force range of 0-2.3 N, and a step size of 0.01 µm. It is capable of precise alignment and measuring of probes down to 50 µm, enabling automated analyses of parameters like device depth, width, angle, and epitaxy. The prober uses a 1600 mm x 1250 mm optical table to provide a stable platform for precise alignment and low-distortion operation. It also includes four digital cameras for in-plane wafer alignment and four encoders for positional feedback during the probing process. The controllers are capable of controlling up to six independent motors, which are designed to reduce vibration noise during the alignment and probing processes. The prober is integrated with an automated wafer handler unit which is designed to reduce errors and eliminate manual operation. The machine can move the wafer up to 45mm in the x, y and θ directions, while minimizing the vibration effect which could otherwise affect the test data. The prober also includes an on board laser depth control that is configurable for individual device testing and provides for measurement accuracy of 10nm. The prober also includes a 6-axis motion control that is capable of controlling up to 12 contact probes for various measurements. Finally, the prober is designed with a series of realistic test conditions to simulate real-world production environments and ensure quality performance.