Used ACCRETECH / TSK APM-90V #9314145 for sale
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ID: 9314145
Wafer Size: 4"-8"
Vintage: 1996
Probe station, 4"-8"
Hot chuck
Vacuum chuck: Nickel plated
Needle polish: Circle
No SACC
CPU Type: MVME 147S-1
Overall accuracy: Within 5 um
Fine alignment: CCD ITV Image processing
Hard disk: 3.5" 2HD (1.4M)
Display: 10.4" TFT Color LCD
X/Y-Axis:
Probing area: ±120 mm
Maximum speed: 200 mm/s
Z-Axis:
Full stroke: 34 mm
Maximum speed: 35 ms / 0.5mm Stroke
Θ-axis:
Rotation range: ±5°
Loader:
Casette mounts: 1 (Right single top)
Wafer Handing: Robot arm / Backside holding
Air supply:
Source pressure: 0.4 Mpa
Consumption: Approximately 0.1 liters / wafer
Vacuum supply: Less than -50 kPA , 30 l/min
Power consumption: AC 100V ± 10V, 50/60Hz, 1.5 kVA
Slot no / Board number / Board name
Slot 1 / MVME162 / Main CPU
Slot 2 / AVME-240 / Memory Board 128M
Slot 3 / - / EtherNet
Slot 4 / - / -
Slot 5 / TVME-322 FDC / SCSI / -
Slot 6 / - / -
Slot 7 / ITV / COGNEX4200
Slot 8 / FA0071A / Parallel In Out (PIO)
Slot 9 / FA0022C / XY Coordinater
Slot 10 / FA0037C / Sub - TTL / GPIB
Slot 11 / FA0139A / 5 Channels PGEN
Slot 12 / FA0132B / VGAC
Slot 13 / - / -
Slot 14 / FA0111 / CAP Sensor
Slot 15 / - / -
Slot 16 / AVME-115 / SLAVE CPU
Slot 17 / FA0013A / LD IO (Loader In Out)
Slot 18 / FA0014B / LD PGEN
1996 vintage.
ACCRETECH / TSK APM-90V is a prober designed for performing wafer testing, measuring and probing. It is suitable for wafers up to 200 mm in diameter and is capable of handling over 200 wafer types. The prober has a high speed wafer handling equipment, with a beam-sliding, multi-zone and multi-zone vacuum chuck. The chuck features a static-dynamic combination design, providing efficient and reliable wafer holding. The integrated thermal control system ensures accurate temperature and repeatability during probing. The prober is equipped with an integrated vision inspection unit which can identify die pattern, and develop an appropriate probing route for the measured wafer. It has an active vision machine which can analyze data quickly, allowing for faster testing times with higher precision. TSK APM-90V is also equipped with automatic and manual (joystick) mode operation. In the manual mode, users can use a joystick to move the testing head to pre-programmed positions and perform calibration, probing, measurement and die picking. In the automatic mode, users can program the moves of the testing head to optimize the testing procedure automatically. The prober features advanced recipes, which allow users to parameterize different tests according to their specific requirements. It also has a built-in failure detection tool which can quickly identify defective items. The data acquisition and analysis capability is enhanced by an embedded Microsoft Windows operating asset and a comprehensive software program. ACCRETECH APM-90V has an intuitive operation interface and comes with a set of interfaces for connection to other equipment and peripherals. This includes a graphical user interface, an Ethernet/RS232 interface, and a USB port. The prober also features a modular design, enabling users to customize or upgrade it with additional components as needed.
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