Used ELECTROGLAS / EG 2001X #9155139 for sale

ELECTROGLAS / EG 2001X
Manufacturer
ELECTROGLAS / EG
Model
2001X
ID: 9155139
Prober Table: High Operating system: Prober vision.CE (Eprom) Ring carrier: RC-1 Profiler: Piston Microscope: Olympus 99 Chuck top: 6 Inch gold-ambient Align camera: Cohu - black Z Stage: PZ-150,0.5-mil DAR Resolution: Low Handler type: 6 Inch belt track Vision module: Cognex PRM-2 Power requirement: 220 Vac Air requirement: 80 psi Vacuum requirement: 18 Inch Hg.
ELECTROGLAS / EG 2001X is a full featured prober, released in 1978 that was used in production environments for failure analysis and wafer test. It is a temperature compensated, parallel-plate, direct-drive metrology tool intended for probing, alignment, and contact testing of wafer-level components, such as transistors and diodes. The probe station includes a 9-axis, 3- carriage table, a dynamic vertical and horizontal alignment equipment and a dual pressure- sensing wafer chuck system with temperature compensation. It features a fast traverse mechanism, a compact design, and two independent XY motion stages. EG 2001 X comes with an angular adjustment unit that provides three different angles, allowing the prober to equally distribute force on the wafer surface for uniform contact. It also features an adjustable head which allows for easy access and positioning of the contact test probes. The device can be manually adjusted for different probe heights and offers an independent adjustment for each wafer pocket. The dynamic leveling machine allows quick alignment of different test probes on the die. ELECTROGLAS EG2001X is equipped with an RS-232 serial interface with multiple functions for handling automated wafer handling and data acquisition. It also features dedicated on-board power supplies and current source controls for controlling the probers position and force. Similarly, the tool features multiple knobs that control the probe position, alignment, and current values, enabling the user to customize the settings to their own specific needs. In terms of its size, ELECTROGLAS 2001 X is a full-size prober with two independent XY motor axes and a single vertical axis. It provides a maximum travel range of 200 mm and has an encoder resolution of 0.25 μm with a tested accuracy of 0.3 μm. The wafer handling is achieved via two front-loading cassettes and a built-in unloading arm which allows full clear-chuck access to the entire 25 mm wafer. Additionally, the tool features a scan speed of up to 800 μm/sec and a maximum probe force of 70N. Overall, ELECTROGLAS / EG EG2001X is a reliable and accurate metrology tool that offers great flexibility for die probing and contact test applications.
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