Used MICROMANIPULATOR 6200 #163139 for sale
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ID: 163139
Wafer Size: 6"
Wafer probe station, 6"
Includes B&L Micro Zoom (7) optics (20-140X), 6" chuck, 6x6" travel, manual movement
Accepts 10 or more magnetic or vacuum based manipulators
1 in. (25.4 mm) thick honeycomb construction for maximum stability
Fine Lift Control
True planar vertical motion, convenient knob control
Resolution: 0.3 micron per degree revolution
Range: 0.5 in. (12.7 mm)
Fast Lift Control
Raises platen and microscope with adjustable microscope lift delay
Range: 1.35 in. (34.3 mm)
Three locking up positions
Resolution: 18:1 reduction (handle:platen)
XY STAGE
Stage Movement
Range of motion 6 in. x 6 in. (152 mm x 152 mm)
Movement and vacuum stage planarity permanently set
at factory
Theta rotation control full 360° with conveniently located
locking knob
Control knobs coaxial X-Y for single hand operation from
either side, located center front
Vacuum Stage
Standard 5 in. (127 mm) diameter with dual tweezer
slots
Gold plated brass for low contact resistance
Flatness t.0005 in. (t 12 microns)
Electrical isolation exceeds 5000 megohms at 500VDC
OPTIONAL SOCKET STAGE
Conversion time vacuum to socket and back to vacuum
stage less than 60 seconds
Accepts P.C. cards with ZIF sockets for probing packaged devices while operating
Locking handle for theta rotation control
MICROSCOPE AND POST
Vertical positioning +1.4 in. ( support)
Vertical motion 0 -1.35 in. (34.3 mm) by platen fast lift
handle or fine control knob with adjustable delay
X-Y translation: 1 in. x 1 in. (25.4 mm x 25.4 mm) with
convenient knob control
Factory planarized X-Y translation
Coarse/fine focus control
Microscope
B&L MicroZoom with 2:1 zoom in body
3 long working distance objectives (2.25X, 8X, 25X)
Quadruple nosepiece accepts optional 50X objective
Trinocular head with camera port, 10X eyepieces
Coaxial illuminator with system mounted transformer and
infinite rheostat control.
MICROMANIPULATOR 6200 is a micropositioning and pointing device that offers tremendous accuracy and flexibility for a range of probing and measurement applications. The device features two sets of crossed GPM-25 micrometers that can be mounted at any angle for maximum flexibility. The manual positioner has a travel range of 10mm in both the linear and angular axes, with 0.1µm resolution, and repeatability of 15µm. It is ideal for a variety of wafer probing, handling, and inspection applications. 6200 provides a stable base to ensure accurate test results regardless of the environment in which it is used. To further minimize errors, the micropositioner incorporates pneumatic damping to provide smooth, response free motion. Its adjustable speed control and joystick handle allow the operator to precisely control motion in both the linear and angular axes. The micropositioner also offers a variety of sensing and control capabilities. It is capable of continuous angular measurement for rapid angular positioning, as well as feedback control for high-accuracy stabilization of surface contact force. Additionally, the position detector responds without the need for manual adjustment to help maintain a consistent force during automated measurements. MICROMANIPULATOR 6200 is a versatile tool that can also be used for wafer testing and inspection. The smoothly rotatable nozzle of the micropositioner can be used for controlled deposition of small drops of solder paste and adhesives, and several WSI-specific chuck-mount gaseous and liquid media sources can be specified according to application. Additionally, the tool can be configured with a Direct-Viewing Microscope and digital imaging capabilities to enable non-contact viewing and qualitative analysis of the sample surface. Overall, 6200 offers a high degree of accuracy and flexibility for wafer probing and testing applications. Its intuitive motion control and sensing capabilities provide the user with reliable, repeatable results and ease of use. Its wide range of available configurations also makes it suitable for a variety of wafer probing, handling, and inspection applications.
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