Used SEMICS Opus III #293758121 for sale
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ID: 293758121
Wafer Size: 6"-12"
Vintage: 2010
Prober, 6"-12"
Nickel chuck
Temperature range: 150 °C
Chiller missing
Control unit
SOC Memory
Rear dock
Pre cold / cold
Hinge manipulator
Maximum test head weight: 1500 Kg
Axis: 3 Axis with fixed point
Motor type: AC Servo with brake
Stroke: ±1000 µm (±370 µm at 300mm Probing area)
Planarity: ±≤10 µm
Stage accuracy: ±1.5 µm
Maximum stage speed: 500 mm/s
2010 vintage.
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