Used SEMISHARE SX12 #9259731 for sale
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ID: 9259731
Wafer Size: 12"
Automatic DC probe station, 12"
Sealed micro chamber
EMI / Light / Noise
Chuck, 12" with central vacuum hole
Vacuum rings for sample holding
Super low noise tri-axial chuck
Output tri-axial adapter
Chuck flatness: 5µm
Chuck quick roll out mechanism for fast wafer exchange
Probe card and probe card holder are adaptable to platen
Platen can load up to (12) micro-positioners
EMI Shielding: > 30 dB (Typical) at 1 kHz to 1 MHz
Light attenuation: 130 dB
Spectral noise floor: ≤ -180 dBVrms/rtHz (≤ 1 MHz)
System AC noise: ≥ 5 mVp-p (≤ 1 GHz)
Optimized microchamber for less CDA consumption
Chuck XYZ-Theta
4 Axes
High precison motorized stage
Controlling system
Travel range: 350 x 500 x 20 mm
X, Y, Z Direction motion resolution: Minimum 0.1 microns
Repeatability: ± 1µm
Accuracy: ± 2µm
Chuck angle rotation range: ± 10°
Theta resolution: 0.0001°
Theta repeatability: 0.0005°
Theta accuracy: 0.001°
Maximum speed:
X/Y Axis: 70 mm/s
Z Axis: 20 mm/s
Chuck driver mechanism:
Zero backlash design
Grinded ball screw and linear guide rail
Chuck stage axes:
Linear scale resolution: 0.1 µm
Microscope XYZ motorized stage and controlling system
Microscope XYZ travel: 2" x 2" x 5"
Maximum speed: > 10 mm/s
Computer connection port:
RS232/485
TCP/IP
GPIB
Motors: Low noise DC motor
Anti-vibration table
SEMISHARE 3 Zoom
High resolution long working distance microscope
Three-speed zoom microscope 15:1
Display low magnification: 0.6x
Display high magnification: 2.5x / 9x
Microscope focus block:
Z Travel: 50.8 mm
Resolution: 1µm
(2) CCD Adapters inside
C Mount adapter
High power white light source: 150 W
Objective: 5x
WD: 34.0 mm
NA: 0.14
Visual magnification: 120-1,800x
(2) Industrial HD (2 Million pixels) CCD
SONY CMOS 2/3"
Resolution: 1920 x 1200
Frame: 30 fps
GigE Interface
(2) SEMISHARE SS-100 Micropositioners
Magnet base with switch
Linear XYZ travels: 12 mm
Linear motion
Probing Inclination: 0-30°
Accuracy: 0.7 microns
(2) AMERICAN PROBE & TECHNOLOGIES 74CJ-APT-KS Kelvin coaxial probe holders
One probe tip
Tip radius: 0.5/1.5/5/10/12.5/15/20 um
AMERICAN PROBE & TECHNOLOGIES 73CT-APTA
Replaceable coaxial probe
Tip radius: 0.5/1.5/5/10/12.5/15/20 um
MEDO VP 125
Silent oil-free vacuum pump 7 l/min
Air compressor
Noise level: 52dB.
SEMISHARE SX12 is a highly advanced prober used in semiconductor testing. It is a specialized tool used for probing the contact points in active components or devices, such as integrated circuits or transistors. It offers a probing solution that is capable of reaching targets with an extreme level of accuracy and repeatability. SX12 prober includes a precision, high speed silicon-based test head. It is integrated into a self-contained wafer prober structure, which can accurately find and measure contact points. The test head offers an extremely high accuracy of 0.5 micron (1.27 x 10-5 inch). This permits the ability to test extremely small components, contributing to the expansive device testing capabilities of SEMISHARE SX12. Along with the sophisticated test head, SX12 also features a precise dust-free wafer mounting platform. This secure contact provides a means to protect the sample from any possible micro-contamination. The wafer is mounted into place using a high-end pneumatic clamping system. SEMISHARE SX12 prober also offers highly advanced automation features. It includes a programmable path generation system, capable of combined a series of T-way, X-Y and depth scans. The probe can access sample targets and precisely measure information from heights as low as 0.05 micron. It also includes automated gain control and stability calibration functions, further extending its automated testing abilities. SX12 is an innovative prober that can reach accuracy standards not found in any other products available on the market. The high accuracy of the test head, along with its comprehensive automation capabilities, provide semiconductor manufacturers with a tool to measure extremely precise contact points in active components or devices. Whether it is working with integrated circuits, transistors, or any other form of semiconductor, SEMISHARE SX12 prober can reach an accuracy not found in any other tool.
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