Used TEL / TOKYO ELECTRON 20S #9069027 for sale

TEL / TOKYO ELECTRON 20S
Manufacturer
TEL / TOKYO ELECTRON
Model
20S
ID: 9069027
Probers.
TEL (TOKYO ELECTRON) TEL / TOKYO ELECTRON 20S is a manual die prober designed for semiconductor production. The prober features a 40 by 40 millimeter cantilever arm that has a radius of 5 microns and a uniform static and dynamic flatness of 2 microns or less. The arm is mounted on a 5 millimeter thick stainless steel frame that is further strengthened with vertical and horizontal stabilizers. Its two separate and independently operable five-axis motor stages operate at 0.00017 degrees of resolution. The prober is equipped with a sample loading system, a vacuum-leveling wafer stage, and 3D microscope and laser alignment systems. TEL 20S offer superior motion accuracy and repeatability of 0.1 microns or less in all five axes. Its adjustable sample holder and leveler can support 15mm- 215mm wafers and a maximum lift of 12 micrometers, creating efficient and accurate sample size detection and alignment. TOKYO ELECTRON 20S also enables routine tests and Rapid Thermal Processing (RTP) using multi-zone temperature control. It operates with three separate zones: sample and heater, chuck, and wafer. The prober has a wide scope of programmable parameters, including pressure, displacement, voltage, time, and temperature. 20S is designed with reliability and performance in mind. Its lightweight frame prevents vibration interference, and its forced ventilation system is engineered with a high velocity low laminar flow to minimize airborne particulate contamination. It features an Field Programmable Gate Array (FPGA) for rapid and high-precision motion control. TEL / TOKYO ELECTRON 20S is also designed with several safety features and ample built-in Test & Measurement functions. The prober offers an efficient thermal-control system capable of controlling temperatures down to -60°C and up to +400°C. Finally, it features a simple yet intuitive graphical user interface for easy operation and configuration.
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