Used TEL / TOKYO ELECTRON 78S #9354471 for sale
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ID: 9354471
Wafer Size: 8"
Vintage: 1996
Prober, 8"
Main body
Accessories
1996 vintage.
TEL / TOKYO ELECTRON 78S is a non-contact prober designed to inspect the electrical characteristics of a variety of semiconductor devices. It is suitable for all stages of production and inspection process, ranging from R&D to process control. Its features include quick installation and high accuracy, making it an ideal tool for engineers and laboratory technicians. TEL 78S comprises two main parts: a mainframe and an integrated metrology equipment. The mainframe houses the core components of the prober, including a XY-stage with a high resolution camera, a colour LCD panel, a video recorder, and a 16-bit microprocessor. The XY-stage has a travel of up to 25 mm in all directions, allowing for accurate measurement of device size and location. The colour LCD panel makes it easy to observe inspection results, while the video recorder provides an archive of each inspection test. The integrated metrology system, meanwhile, consists of several sensors including a unit-level AFM (atomic force microscope), an electrostatic discharge (ESD) detector, a capacitance detector, a dielectric residue tester, and a thermal imager. The AFM offers micro-scale imaging capability, which can be used to measure device parameters down to nanometer resolution. The ESD detector can detect accidental static discharges, preventing sample destruction or damaging equipment. The capacitance detector is employed to measure the electrical characteristics of a device, while the dielectric residue tester detects molecular-level residue on the surface of a sample. Finally, the thermal imager enables simultaneous imaging at both visible and infrared wavelengths. All the components of TOKYO ELECTRON 78 S are controlled by a Graphical User Interface (GUI) for easy operation. The prober is further equipped with an image processing library, which provides automated data analysis functions such as automated segmentation and feature extraction. In summary, TEL / TOKYO ELECTRON 78 S is a reliable and accurate prober device that can be used for semiconductor device inspection and characterization. It is equipped with a comprehensive metrology machine and an advanced image processing library, making it an essential tool for engineers and laboratory technicians.
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