Used TEL / TOKYO ELECTRON P-12XL #293816006 for sale
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ID: 293816006
Wafer Size: 12"
Vintage: 2003
Prober, 8"-12"
(2) Pincettes
(2) Front Opening Unified Pods (FOUP)
D250 Chiller
System Host (SH) communication error
2003 vintage.
TEL / TOKYO ELECTRON P-12XL is a semiconductor wafer probe station that meets the demanding requirements of both design and production test applications. TEL P12XL features a high-speed, two-axis motorized prober, a motorized wafer chuck, and a rigidly constructed bench-level frame. The prober enables automated probing of up to 25 x 25mm probe cards and up to 10mm thinning at the end of the prober arm. A precision air bearing provides smooth movement of the probe head and a stepper motor driven rotary stage allows for sample orientation that is exact within .05 degrees. TOKYO ELECTRON P 12 XL is equipped with a 10-step wafer chuck for up to 200mm wafer size and down to 150 mm wafer size. A titanium linkage arm is employed to reduce crosstalk and stability during high-speed scanning. TEL P 12 XL can accommodate up to four probe cards with a debris management system and is capable of supporting high temperature environments up to 180C. The integrated CCD zoom microscope can provide magnifications up to 200X and offers variable table tilting to improve probe card alignment. Additionally, TEL P-12 XL can be tailored to meet specific industry requirements with optional accessories such as an oxygen sensing system, backside cooling, a motorized sample stage, and an overpressure system. TEL / TOKYO ELECTRON P-12 XL provides both time and cost efficiency for testing of wafer-level die and devices with unprecedented accuracy and performance.
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