Used TEL / TOKYO ELECTRON P-12XLm #293609218 for sale
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ID: 293609218
Wafer Size: 12"
Vintage: 2006
Wafer prober, 12"
Main power supply
Monitor
Stage:
Chuck top: Hot chuck
ASU Camera assy
X-Motor
Y-Motor
Z-Motor
X-DRV
Y-DRV
Z-DRV
SACC
Hot chuck controller
Board stage base Type2
X Stage board
Z Stage board
VIP3
TVB9003-1/136
TVB0004-1/147C0N
Loader:
Controller assy
Arm assy
Z-Motor
Theta motor
Serch sensor cylinder
VME Boards:
PST-OPT
PST I/F
PCB PST STD
MR-MC01-S100
Interface
GP-IB Interface
2006 vintage.
TEL / TOKYO ELECTRON P-12XLm is a prober—a specialized robot specifically designed for the inspection of semiconductor wafers. Equipped with a grip arm, automated wafer handling equipment and an advanced imaging system, TEL P12XLM is capable of carrying out a range of tests to inspect and characterize a wafer's electrical and physical properties. TOKYO ELECTRON P 12 XLM is designed with a wafer stage capable of moving in both X- and Y-axes and rotating 360°. The use of a stepper motor offers highly precise positioning over a size range from two inches up to 300mm (12-inch) in diameter. This enables it to accurately index onto individual die sites while the operation of the autofocus and joystick control lets it probe and inspect wafers with an impressive 0.1 µm accuracy. Its video aided navigation and self-learning control systems also give it the ability to recognize defects and register patterns over the entire wafer, leading to incredibly high levels of specialization. Moreover, this prober is equipped with a multi-probe assembly station, along with multiple probe cards for switching and controlling the probes. This allows it to quickly switch between multiple probe tips for different tests, and enables its usage in a variety of inspection scenarios. The platform also has several other features, such as an auto-task list, auto-abort process, and a user-friendly graphical interface. Additionally, TEL P-12XLm has an inbuilt safety unit for providing reliable operation through the entire process. The inclusion of both an emergency stop button and an emergency power button offer excellent safeguards, while its Over Pressure Protection Machine shields both the prober and the critical components. P-12 XLM is the perfect tool for ensuring and evaluating the quality of semiconductor wafers. With its impressive accuracy and multi-functional design, it is a must-have for semiconductor research and production.
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