Used TEL / TOKYO ELECTRON P-12XLn #9102060 for sale

TEL / TOKYO ELECTRON P-12XLn
Manufacturer
TEL / TOKYO ELECTRON
Model
P-12XLn
ID: 9102060
Wafer Size: 12"
Prober, 12" Hot Chuck Unit(Gold or Nickel) Top Plate Assy VIP3 CPU with R14 Series O/S Open Type Foup Loader.
TEL / TOKYO ELECTRON P-12XLn prober is a high-end Analytical Electron Microscope (AEM) designed for semiconductor wafer testing and metrology. It has a four-axis digital servo equipment that delivers precise, repeatable movement with very low levels of thermal distortion for maximum sampling accuracy. It features a large, open-space design that supports both standard-size and ultra-large wafers. It incorporates a high-resolution digital camera for expansive survey imaging and advanced automated particle-counting capabilities. TEL P 12 XLN prober is equipped with a large, bright field X-Y-Z wafer stage with high load capacity, as well as an extended Z axis to accommodate a large sample range. It has a powerful Vertical Scanning Electron Microscope (VSEM) with a short settling time, which offers high image resolution and high throughput rate. This prober also features TEL patented Beam Optics Control (BOC) system, which provides exceptional focus stability and minimized spherical-aberration effects. In addition, TOKYO ELECTRON P-12 XLN has a unique nanofocusing unit and two-stage auto-centering wafer chuck. The nanofocusing machine allows for ultra-precise positioning of the electron beam and very small area imaging, while the auto-centering feature provides quick and accurate alignment for fast scanning times. The prober is designed to minimize vibration, enhance image stability, and ensure highly accurate sampling within a wide range of samples. TEL P-12XLn prober also provides superior edge-following capabilities. It utilizes a multi-column auto-centering plate with multiple points that can detect edge wafer motion while capturing highly accurate images. The prober supports multiple types of wafer stages and samples ranging from standard-sized to ultra-large wafers. Moreover, TOKYO ELECTRON P 12 XLN is controlled by the latest TOKYO ELECTRON software and is compatible with a range of operating systems for comprehensive testing. Overall, P-12 XLN prober is an ideal solution for testing and metrology in the semiconductor industry. Its high-precision components and advanced features ensure exceptional image quality, repeatability, and accuracy. Its wide range of features and capabilities also provide users with ultimate flexibility in analyzing and testing a variety of samples.
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