Used TEL / TOKYO ELECTRON P-8XL #9161662 for sale
URL successfully copied!
ID: 9161662
Automatic wafer probers
Diameter: 6"-8"
Thickness: 150~1000 um
Max.Weight: 110g
Die size: 300~99999 um
Stage:
Contact accuracy(X,Y axis):
±6um (1995)
±4um Probe to pad
Contact accuracy(Z axis):
±5um (1995)
±5um
Z Chuck strength: 60kg
Deflection spec:
15um (Vertical)
8um (Horiz) @ 10kg 90mm From center
Z Acceleration: 1.0G
Z Stroke (maximum): 95mm
Z Probe range: 65.8mm to 93.3mm
Z Maximum velocity: 40mm/s
XY Stage / Platen:
Accuracy: Each axis ±2um
XY Stroke:
±118mm (X)
230~-110mm (Y)
Max. speed: 200 mm/sec
Acceleration: 2.2G
X: 2.2G
Y: 2.2G
Resolution: 0.4 um
Vibration (resonant):
X: .70 um
Y: .42 um
Overall accuracy, X,Y,Z, Q, PTPA:
X, Y and PTPA -- +/- 4 um @ 22C to 28C
Z and PTPA +/-5um @ 22C to 28C
APTPA Accuracy (Guaranteed probe marks using APTPA):
X/Y: ±6um
Z: ±5um
Chuck mechanism:
Rotation range: ±7.0 Degree
Angular resolution: 0.00022 Degree
Pre-align section:
Rotation speed: 360 Degree/sec
Alignment accuracy: XY±300um
Theta accuracy: ±0.17 Degree
Control resolution: (1) Degree
Alignment system: LED
Alignment :
Automatic self-teach & align: Yes
Temperature compensation: Every wafer
Auto set-up camera:
Bridge camera
Macro mode
Magnification: 0.41
Viewing area: 15.6 X 11.7mm
Medium mode (TEL shiva option)
Magnification: 3
Viewing area: 2.1 X 1.6mm
Micro mode
Magnification: 17.8
Viewing area: 0.36 X 0.28mm
DPS Camera:
Resolution
Macro mode
Magnification: 0.8
Viewing area: 5.85 X 7.8mm
Micro mode
Magnification: 12
Viewing area: 0.39 X 0.52mm
Display:
Type : TFT LCD Touch panel
Graphic function: Yes
Full color: (8) Colors
Bin color: Eye level
Position: Everything on LCD panel
Probe card changer:
Load & unload: Auto
Max. probe card size: 350mm
Need to do wafer unloading first: No
Parameter storage:
Remote set-up option: Yes
FDD: 3.5" 1.6M
HDD: 2.5" 352M
Manipulator:
Type: Motor
Swing motion: Stable
Remote control: Available
Hinge swing safety warning: Yes
Positioning accuracy (XYZ).
TEL / TOKYO ELECTRON P-8XL is an ultra-precise, fully automated prober used for probing wafers and other flat materials. TEL P8XL utilizes its innovative robot arm with 5-axis motion control to guarantee accuracy and repeatability. It combines an ultra-precision stage, a high-speed scanning measurement head and a powerful software platform to ensure high-precision, efficient wafer probing. TOKYO ELECTRON P8-XL features a wide range of wafer sizes compatible with various non-contact and contact scanning methods, including laser triangulation, optical light-based scanning, and capacitive imaging. The system is equipped with various built-in probes, which allow it to perform a wide range of tests from low frequency through high frequency range. It also supports advanced functions such as wet, dry, and liquid handling capabilities, and provides process control and automation functionality. TEL P-8 XL is a highly reliable and efficient prober. It features an innovative, easy-to-use automation system and motion control to ensure repeatability and accuracy. Its advanced design ensures low noise, high-speed scanning with a wide dynamic range, while its precise stage provides high-precision control with a large active measurement area. The robot arm uses sophisticated control algorithms to adjust its position according to the topographical features of the sample. The controllability and repeatability of the scanning microscope allow for high-throughput, accurate data acquisition. Additionally, TEL provides a software interface to combine P-8XL's various probes and systems, which allow the user to interface with the prober remotely. Overall, TEL / TOKYO ELECTRON P-8 XL is a reliable and cost-effective prober designed to perform probing on a variety of flat materials. Its combination of high accuracy, repeatability, and automated operation makes it an ideal choice for semiconductor and other industry-related applications. Its user-friendly automation system, sophisticated motion control, and software interface make it an attractive choice for any laboratory setting.
There are no reviews yet