Used TEL / TOKYO ELECTRON Precio #293778644 for sale
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ID: 293778644
Probers
Interface: V93K DD
Wafer loader, 12"
Hot and cold chuck temperature: -55 -150°C
WAPP
Flip SACC
OCR.
TEL / TOKYO ELECTRON Precio is a dual-beam scanning electron microscope (SEM) prober widely used in research and production laboratories. It enables the study of the electrical and geometrical properties of a wide variety of materials and devices. The prober combines a high-voltage electron source, a secondary electron detector, and a scanning stage, each to be tailored for the particular application. This allows for flexibility in probing devices with either electrical or mechanical properties. The electron source operates in an ultrahigh vacuum to optimize the performance of the electron beam. It can use either a traditional electron gun or a field emission source. The source can be operated at high electron energies up to 15 keV for studies of thick material layers or up to 30 to 150 keV for studies of deeper structures. The secondary electron detector of the prober is used to determine the topology of the object and also for obtaining images and analyzing compositional data. The detector has a sensitivity of 0.1-100 electron Volts (eV) and can be used for high resolution imaging of samples. The energy resolution of the detector is also very high, ranging up to 0.5 eV. The prober's scanning stage consists of a five-axis motion system, allowing the sample to be moved in the X,Y,Z, Pan, and Tilt directions under computer control. This enables the prober to measure contact resistance at various points of the sample. The prober is capable of performing a number of measurements including current-voltage, capacitance-voltage, transconductance, and resistance. These measurements are used to store data and provide insight into the properties of the sample. It also enables the study of thin and fragile structures such as those found in semiconductor devices. TEL Precio is a versatile prober, designed to provide precise and fast measurements for a range of materials and devices. It has been used for imaging and electrical measurements in many research and production laboratories, and is widely regarded as one of the most versatile probers available.
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