Used TEL / TOKYO ELECTRON Precio #9282715 for sale
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ID: 9282715
Wafer Size: 12"
Vintage: 2016
Prober, 12"
Loader type: FOUP
Chuck material: Nickel mirror chuck
Chuck temperature: Hot
Temperature range: Room ~+150°C
Auto wafer ID reader:
Insight OCR 1721
Auto needle alignment
Auto wafer alignment
Needle cleaning for stage:
GPIB interface
No 230mm x 150mm
No filp SACC
No WAPP
No black brush
No chuck blow
No touch pen
No color CCD Alignment camera
No (3) Eyes alignment camera
No Hard Disk Drive (HDD)
No gold plate chuck, 12"
No temperature control with chiller
No auto card change
Optical system: ASU/BCU-II
Needle mark inspection
Single loader
Color LCD Display
2016 vintage.
TEL / TOKYO ELECTRON Precio is a prober made by TEL, one of the world's leading and most respected semiconductor production equipment manufacturers. TEL Precio is a non-contact, highly accurate prober for photo-lithography. It uses dual optical levels (UV and VIS) to provide superior imaging and alignment accuracy for delicate semiconductor wafer surfaces. It is designed for high cycle time production, providing unequaled throughput while maintaining the highest quality workmanship throughout the process. TOKYO ELECTRON Precio utilizes state-of-the-art and leading-edge semiconductor technology from Japan. It offers direct alignment accuracy of less than +/-2 microns, and allows for a repositioning error of less than 1micron per cycle. This ultra-high precision is enabled by an advanced GEM equipment. The GEM system supports high-precision alignment and scanning over a wide range of wafer types. Precio is equipped with a real-time vision and measurement unit to ensure accurate and repeatable results. Its main features include a high-speed, non-contact optical measurement machine, advanced image processing technology, and touch and area adjustment functionality. In addition, it is designed with a microscope view for precise particle analysis and substrate surface calibration. TEL / TOKYO ELECTRON Precio is capable of processing up to 3D wafer sizes and can perform non-contact measurement of up to 6 geometries. Its dual optical-level UV/VIS tool provides the ability to measure at different depths beneath the sample surface. The robust design can handle up to three wafers per cycle, and its automatic alignment asset guarantees repeatable and accurate results. TEL Precio has a built-in Quality Metrology Model (QMS) which provides performance and reliability assessment capabilities. It allows for versatile process monitoring, providing superior insight into the correlation between process parameters and quality results. TOKYO ELECTRON Precio is ideal for processing delicate semiconductor wafers. It is easy to use with superior imaging and alignment accuracy, while maintaining excellent throughput. Its advanced features such as dual optical levels, real-time vision and measurement, and the Quality Metrology Equipment combine to provide customers a reliable and accurate prober.
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