Used VEECO FPP 5000 #155579 for sale
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ID: 155579
Four point system with probe head
Features:
Compact integral probe and display
Resistivity: 450k ohm/sq
Resolution: .001 milliohm/SQ
0.5% High accuracy
Index substrate holder
Integral RFI and light shielding for high resistivity measurements
Back lit front panel
Selectable displays:
Sheet and bulk resistivity
V/I
Thickness in, A, MILS, or microns of a slice or layer with bulk resistivity
Geometric correction range:
Selectable baud rate: 9600, 4800, 2400, 1200, 300, 150
Output: 25 Pin female subminiature "D" connector
Hand held probe head:
Testing wafers over 6" in diameter
Includes 6' cable
Electrical specifications:
Power: 115/230 VAC +/- 10%, 50/60 Hz, 30 W.
VEECO / DEKTAK FPP 5000 is a versatile and powerful prober designed to enable precise measurements of device electrical characteristics. It is used in a variety of settings, including testing wafers during the manufacturing process and measuring electrical connectivity during research and development. VEECO FPP 5000 features a combined optical and contact scanning equipment to enable accurate probing of both contact and non-contact features. It features a three-axis scanning system, which can probe samples with high accuracy for a variety of applications. The unit is driven by a motorized stage with a rotary platform that can move the sample in a vertical direction and the X-Y plane. The machine is equipped with a 6-axis, closed loop servo tool that can detect and correct errors in the sample position to ensure precise results. The asset also features a scale-dependent air buffered vacuum chucks to hold the sample steady. This feature increases the accuracy of the device by eliminating any potential substrate drift in measurement applications. The individual probe assembly features a linear actuator to accurately measure the sample. DEKTAK FPP-5000 is equipped with a High Accuracy Surface Autocorrelator (HASC) embedded in the model for advanced non-contact accuracy. This tool measures the half-pitch, pattern orientation, and CD uniformity of the sample with high accuracy. The equipment also features automatic wafer focusing to quickly bring the samples into the imaging plane and improve accuracy. The individual probe is equipped with an input/output filter to protect samples from radio frequency interference. This feature allows scanning across frequencies while still obtaining accurate results. VEECO FPP-5000 also comes with powerful user interface software that can be configured to fit a wide variety of applications. This software is designed to provide secure access to the system, ensuring that only authorized personnel can monitor or modify the settings. DEKTAK FPP 5000 is an ideal solution for applications requiring precise sample probing and measurement. Its advanced features make it suitable for use in a variety of settings, such as manufacturing and research & development, enabling users to obtain high-quality data about device characteristics.
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