Used ALCATEL / ADIXEN / PFEIFFER ADS 602P #293660158 for sale

ALCATEL / ADIXEN / PFEIFFER ADS 602P is a turbo molecular pump designed for continuous service in high vacuum applications. This pump features an accumulator plate which can store up to 24 liters of vacuum and a triple stage rotor design. ADIXEN ADS 602P has an inlet size of 1000 liters per second fore nitrogen pumping speeds. The pump has a maximum possible pumping speed of up to 7500 liters per minute and the ultimate vacuum pressures are possible down to below 10^-7 mbar. ALCATEL ADS 602 P is equipped with a diffusion pump interfaced motor with robust asynchronous drive as well as frequency control with PWM technology. The pump is highly compact and lightweight with a volume weight ratio of 0.41 kg/dm3. ALCATEL ADS 602P is ideal for semiconductor industry applications due to its stringent requirements on ultra-low process vacuums with minimal contamination. The corrosion-resistant anodized aluminum housing ensures a long service life of the pump, and the self-lubricating ceramic radial bearings guarantee a minimum water vapor in the pumped gas. Additional features include easy installation and maintenance, an active cooling system to ensure controlled temperatures, and dynamic balancing rotor technology which reduces pump vibrations and acoustic noise. PFEIFFER ADS 602P also offers customers the ability to monitor all operational parameters through built-in RS232/485 ports, and comes with a two year warranty ensuring quality and reliability in operation.