Used BOC EDWARDS iH1800 NRV MK5 #9129480 for sale

BOC EDWARDS iH1800 NRV MK5 is a rugged and reliable atomic layer deposition pump designed and manufactured by BOC EDWARDS. With its innovative technology, it provides consistent compliance and a reliable layer thickness profile. It is specifically designed for demanding applications and processes, whether for polymers, metals or dielectrics. To begin, this pump features an integrated and automated self-charging NRV (Negative Resistance Valve) that allows for automatic adjustment of speeds, pressures and mist reduction. This enables precise control of process parameters with minimal operator intervention while minimizing losses due to atmospheric pressure effects. The NRV system is designed for uniform and consistent layer coverage despite fluctuations in process conditions. The iH1800 pump also includes a direct low-vacuum mechanical forepump. This allows for relatively fast pump down time, while providing clean air intake for the upstream process. The Mechanical forepump is rated to 25 Pa and can be fitted with a centrifugal blower if desired. It is capable of accommodating a wide range of different gas species depending on the application. Additionally, iH1800 NRV MK5 offers best-in-class vacuum control so that processes can be repeatable, independent of atmospheric pressure and presence of moisture or other condensable species. This is achieved through anisotropic electrically-assisted gate valve (EAGV) technology. It is capable of up to 5 million open-close operations with improved lifetime compared to traditional gate valves. Finally, this pump is designed and certified with safety and reliability in mind. It is comprised of high quality materials that provide durability and resistance to corrosion. The internals can be easily assembled and disassembled and have low-maintenance requirements. It has a highly reliable hybrid electronic system, which helps eliminate operational downtime due to pump failures. In conclusion, BOC EDWARDS iH1800 NRV MK5 pump is an effective and reliable pumping technology for demanding ALD processes.