Used CANON / ANELVA P-875CA #9105082 for sale

CANON / ANELVA P-875CA is a high performance, wide range pumping equipment designed for plasma etching processes. This versatile system offers excellent pumping speed and superb reliability for the demanding plasma environment. It is a compact, high flow rate, low maintenance, collective ion pump, specifically designed for the etching process. CANON P-875CA can be used for a variety of applications due to its superior pumping speed and short recovery time. Its five-stage design allows for high pumping speeds up to 875 liters per second with a very low pressure differential of 0.2 Torr. This allows for the etching process to be accurately monitored and controlled, taking into consideration the specific needs of the application. The unit is equipped with a Vacuum Gauge Controller, providing high accuracy and flexibility, as well as a Dual Frequency Power Instability Detector which can detect any power fluctuation in the machine and alert the user. Additionally, the tool has a high quality Turbomolecular Side Pump offering high pumping speed, low vibration, and high survivability. In order to ensure excellent reliability, ANELVA P-875CA is designed with all necessary components built into a one-piece casing made from stainless steel and individual O-ring seals. This prevents any exposure to any outside contamination, avoiding the risk of damaging the asset's inner components. Overall, P-875CA is a superior model offering excellent performance and reliability. It is perfect for the etching process due to its wide range of applications and features such as its Vacuum Gauge Controller, Dual Frequency Power Instability Detector, and Turbo Molecular Side Pump. The one-piece casing design helps to ensure the equipment's long-term reliability and excellent performance.