Used ULVAC DAL-10S #9110366 for sale

ULVAC DAL-10S is a dry-mechanical pump with a very high level of strength and performance. This pump is designed to meet the most demanding requirements of plasma processes such as RIE (Reactive Ion Etching), CVD (Chemical Vapor Deposition), MBE (Molecular Beam Epitaxy) and other etching applications. DAL-10S is a radial-type dry-mechanical pump that has a two stage compression consisting of bearing lubrication and a piston/plunger mechanism. It uses a cylindrical rotor of a special design that allows for efficient operation even at ultimate pressure. This rotor is made of highly resistant stainless steel and is directly connected to the drive shaft ensuring a low-vibration operation. The two-stage compression method utilizes a piston in the inner cylinder and a valve in the outer cylinder. The piston and the valve create a vacuum in the inner cylinder that is directly transferred to the process chamber. The inner cylinder has a number of curved vanes along its diameter to ensure an even flow of pumped gas along its entire length. ULVAC DAL-10S pump is designed for high flow rate capabilities with a maximum nominal pumping speed (NPS) of 25 m3/h (900 l/min). Inline filtration and particle elimination are provided by a well-designed stainless steel strainer that can remove particles and dust as small as 0.3μm. The pump is enclosed in an all-welded stainless steel housing and is provided with an oil level indicator, an oil drain port, and a drain valve. It can operate in temperatures from 0ºC to 45ºC and the noise level is lower than 65 dBA. For convenience, DAL-10S is provided with a visual pressure gauge and a pressure indicator panel. ULVAC DAL-10S is a reliable and long-lasting dry-mechanical pump that is ideal for many plasma processes. Its low-vibration, low-maintenance design ensures a trouble-free operation and maximum efficiency. With its excellent flow rate and filtration capabilities, this pump is an excellent choice for any process that requires a premium quality vacuum.