Used ULVAC EC403 #293687595 for sale

Manufacturer
ULVAC
Model
EC403
ID: 293687595
Vacuum pumps.
ULVAC EC403 is an anodic bake vacuum pumps, designed to create high vacuum conditions of up to 1 x 10-9 mbar. The pump features a rotary vane type mechanism, offering a pumping rate of 10.6 m3h-1, and can reach the desired ultimate vacuum level in a very short time. The pump has a 3-stage design, with a front end and two pumping stages, which allow fast evacuation of extreme systems. The front end employs an input port, exhaust port, and a mechanical booster pump. This booster pump creates a high ambient pressure, enabling the first and second stage pumps to evacuate the chamber faster than with a single stage. The first stage of the pump is a Roots-type mechanical booster. This Roots blower is driven by an electro-mechanical motor, and it increases the pressure on the rotor blades. It features a three-lobe rotor for higher efficiency, and maintains a constant flow at all operating points. The second stage of the pump is a rotary vane type piston pump. To keep a lubricated vane surface, a two-stage bearing system with grease lubrication is employed. This enables the vane to run at high speed and remain sealed for an extended period of time. The pump also features an improved dust filter that prevents contaminants from entering the pumping chamber. For optimal energy efficiency during operation, EC403 features a rotary vane type compressor, and a turbo-molecular pump. Both of these increase the efficiency of the pump, and help it consume less energy. ULVAC EC403 is an advanced and high quality anodic bake vacuum pump. It features a 3-stage design, with a Roots-type mechanical booster, a rotary vane type piston pump, and a rotary vane type compressor. It has a pumping rate of 10.6 m3h-1, and it can reach ultimate vacuum levels of up to 1 x 10-9 mbar. The pump features a turbo-molecular pump and an improved dust filter, assuring optimal energy efficiency during operation.
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