Used ULVAC LR90 #9287394 for sale

ULVAC LR90 is a rotary vane mechanical vacuum pump designed for ultimate vacuum applications and is capable of achieving vacuum levels up to 0.005 torr (5 x 10-4 mbarA). It features a direct drive motor, forced lubrication of internal components and optimal sealing measures to minimize the ammonia leak rate. The high ultimate vacuum, combined with advanced oil recovery systems and contaminant management, make it ideal for semiconductor processing. LR90 includes an energy-efficient, ultraquiet direct drive motor for long-term, continuous duty operation. It also features an advanced oil recovery equipment that increases efficiency by recovering oil from the vacuum chamber and using it for assuring continuous lubrication of the pump. Its advanced contaminant management system features a two-stage oil separator to reduce operating costs. ULVAC LR90 has an optimal sealing measure to minimize the leakage rate of the ammonia. This includes double-acting O-ring seals to achieve a sealing factor of 500 when provided with clean nitrogen and/or oxygen. A special ventilation unit reduces the ammonia leak rate to 1.0 x 10-8 mbarA, reducing residual gas contamination. LR90 is designed for easy maintenance and replacement. The pump can be used without disassembly, and its robust construction allows for up to 50,000 hours of continuous operation. It also has a wide range of operating temperatures, allowing for use in a variety of environments. In addition, ULVAC LR90 has an integrated monitoring machine that provides real-time information on the pump's performance. It also includes a protect-mode feature that will shut down the pump in the event of abnormal operation. The built-in temperature and differential pressure indicators alert the operator of any problems. LR90 is an advanced rotary vane mechanical vacuum pump that is designed for ultimate vacuum applications. It features an energy-efficient direct drive motor, advanced oil recovery systems, and an optimized sealing measure to minimize the ammonia leak rate. Its integrated monitoring tool and protect-mode feature provide real-time information and alert the operator of any problems. With its robust construction, long-term operation, and wide range of operating temperatures, ULVAC LR90 is an ideal choice for semiconductor processing.