Used VARIAN DS 602 #110124 for sale
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VARIAN DS 602 is a diaphragm pump designed for use in the semiconductor and related industries. This pump is ideal for use in applications such as ultra-high vacuum deposition of thin films and other advanced semiconductor processes. The pump is designed to provide high pumping speeds at lower pressures while remaining extremely reliable and extremely quiet on operation. VARIAN DS602 is a dry-claw style multi-stage vacuum pump with dry running non-rotating linear motion seals. The design incorporates a full set of bearings, each with its own mechanical seal, in a sturdy and well-sealed housing to ensure maximum durability and performance. The fully enclosed housing prevents contamination and also aids in keeping sound levels at a minimum. DS-602 includes a unique rotor design that provides steady and well-controlled pressure at low vacuum levels, making it perfect for optimized throughput in semiconductor applications. Additionally, a number of industry standard controls are available that allow for easy control of vacuum pressure and other operating parameters. The pump is driven by a powerful AC synchronous motor with a 50/60 Hz frequency range, designed to provide maximum torque at low frequencies. This feature ensures that VARIAN DS-602 is capable of providing reliable operation at higher pressures and temperatures. Additionally, the motor is specifically designed to reduce vibration and noise levels, making it ideal for use in sensitive semiconductor applications. DS602 is designed to provide highly efficient operation, with 95% of all compressed air utilized to maximize potential throughput. Additionally, the pump is equipped with a set of intake and exhaust filters that further help to reduce particulate contamination and increase efficiency. The included safety interlocks help to ensure that operation stays within the equipment's parameters, and as additional safety measures, a pressure release valve and a blower are available for operation at lower pressure and temperature ranges. Overall, DS 602 is an excellent solution for applications requiring reliable, low pressure and high pumping speed performance. As an added bonus, its design ensures that the pump dynamically maintains nearly noise-free operation, making it ideal for a range of sensitive semiconductor-related applications.
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