Used NOVELLUS Vector #9149328 for sale

NOVELLUS Vector is a high-performance etcher/asher specifically designed to meet the demanding needs of today's semiconductor market. It offers a variety of different models, configurable to fit any size and type of chip or board. It uses the latest technologies to achieve rapid cycle times, high yields, consistent etch profiles, and uniformity across a large substrate. Vector etchers are designed for precision etching and ashing of many substrates, including copper, aluminum, silicon oxide, steel, nickel, and aluminum. The system features a high etch rate and uniformity and is especially well-suited for applications requiring high precision and repeatability or fine feature definition. NOVELLUS Vector etchers use a combination of reactive ion etching (RIE) and plasma-enhanced chemical etching (PECE) to achieve high throughput. A state-of-the-art plasma source is used to ionize the reaction gas supplied to the chamber, while a PECE technique adds to the operational flexibility of the etcher. These combine to deliver high-quality process results and reduce processing time, making Vector etcher one of the fastest in its class. In terms of its range of available parameters and system configurability, NOVELLUS Vector etcher is hard to beat. It offers both high- and low-temperature processing, as well as process flexibility with respect to etch times and other control parameters, providing users with the control to optimize their processes for their specific application. Additionally, Vector etcher features advanced process control so users can accurately monitor substrate etching and etch rates. NOVELLUS Vector etchers achieve outstanding repeatability and feature definition by incorporating their proprietary, "OptiVect" etch process. Computer-controlled radio frequency (RF) power sources offer precise and versatile control of multiple frequency ranges, allowing for the highest possible process uniformity. In summary, Vector etchers offer some of the best performance standards in the industry. By leveraging cutting-edge technologies and incorporating powerful process control capabilities, NOVELLUS Vector etchers combine fast processing time with excellent feature definition and uniformity. They are the ideal choice for any process requiring precision and uniformity.