Used AIXTRON Spare parts for 2600 G3R / 2400 / 2600 G3 #293637152 for sale

Qty / PN / Description (1) / D460*t2 / Ceiling with hole (1) / 40020713 / D460*t2 / Ceiling, D460,t2,Adit_Hole (10) / 40040885Z / 101.4x0.65*t5 / Disc 4" for robot (82) / 40040389 / 101.4*0.65*t5 / Disc 4" with notch (1) / 40040153 / Disc 4" (full plane) (4) / 40020457 / 90", b=64, t=4 / Cersan,Segment-Plate (10) / 40040155 / Disc 3" (5) / 40040080 / Disc 2" (3) / 10170049 / Filmetrics sensors (2) / 40150112 / 6", Hard / Clear,Anodi, Meta Cassette, Wafer (1) / 40012457 / 12x3, Version2 / Impulsgeber*S(9) / 40012451 / 5x4, 5x6, 5x3 / Impulsgeber*Sensor for robot (1) / 40012452 / 8x4, 8x3, 8x2 / Impulsgeber*Sensor for robot (1) / 40030479 / (2) Coil jumpers parted*2mm / RF Coil short cut 5x6" ensor for robot (2) / 40040710 / D33.5*t20 / 5x6" Tension discs (2) / 40040557 / D99*t20 / 8x4" Tension discs (4) / 40040677 /Φ84.0*5.0t,D=0.4 / Supporting discs (3) / 40040709 / D440,t24,R,M,H / 5x6" Planet (10) / 40040700 / 8x4" Planet (6) / 40020643 /D46*t22 / Nozzle body (4) / 40020643 / Nozzle body (2) / 40020642 / Nozzle rings (4) / 40020512 / Nozzle shafts (3) / 40020445 / Sleeves (1) / 40020956 / D6*L67,CH-001B / Supporting tube (35) / 40021227 / 7*6" Ceiling (1) / 41031668 / 9 turns RF Coil (5) / 41031668 / 9 turns RF Coil (used and clean).