Used AMAT / APPLIED MATERIALS 0010-16858 #9355729 for sale
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ID: 9355729
Wafer Size: 12"
Electrostatic chucks (ESC) for Endura, 12"
Process: 10 nm
Type: Bipolar
Flatness: 0.0009"
Operating voltage: 500 VDC
Leakage voltage: 800 VDC
Residual pressure: <5 Torr
Maximum pressure: >12 Torr
Backside pressure / Helium leak rate
4 Torr / 0.3 SCCM
6 Torr / 0.4 SCCM
8 Torr / 0.5 SCCM.
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