Used AMAT / APPLIED MATERIALS / HCT SRU #9172487 for sale

Slurry recovery unit Supply capacity: 5-10 slurry wafer saws Compressed air pressure (Min): 6 Bar Compressed air flow: 0.05 m3/h Quality: Dry Installed power: 92 kVA Measured consumption: 42 kVA Current (connected load): 133A Current usage: 60 A Ground loading: 1600 kg/ m2 SRU operating area: 6.5 x 6.5 m Electrical hooking: 3 x 400 VAC - 50 Hz Additional facility requirements: Heavy-duty lifting equipment (min): 700 Kg Drain Exhaust for vaporized coolant: 500 m3/h (130mm dia) Includes: Manual.