Used AMAT / APPLIED MATERIALS RTP Chamber for Centura Radiance #9292776 for sale
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ID: 9292776
Wafer Size: 12"
Vintage: 2002
12"
Hardware:
Main system
SMIF System
Handler system
Process chambers
Remote radiance power box
Missing parts:
Throttle valve
Skin interlock cable
MFC Cables missing NO, N2O and O2
S2 / S8 Safety specification
Gasses:
Gas 1: N2
Gas 2: O2
Gas 3: H2
Gas 4: N2O
ISSG
SS Tubing
AMAT Tubing
Air operated valve:
8156 MFC unit
Torr general pressure displays and cabinet exhaust displays
Temperature control: Furnace temp controller
Facility electron: 208 V, 3 Phase
2002 vintage.
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