Used AMAT / APPLIED MATERIALS TxZ Chamber for Endura #9245027 for sale
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ID: 9245027
Wafer Size: 8"
8"
Chamber kits:
Part number / Description
0240-27492 / TxZ Chamber body
0242-35628 / TxZ Chamber liner tool turbo kit (TMP 361C Turbo pump included)
0010-36889 / TxZ Chamber pumping plate
0010-39306 / TxZ Heater lift assembly
0010-08805 / TxZ SAL Lid assembly (Include molded cover HP+)
0242-36032 / TC AMP Interlock enclosure kit
0140-21826 / TxZ Chamber harness assembly
0010-09035 / PECVD Throttle valve, 5" & 6"
647B Series / MKS Baratron gauge 10 Torr
647B Series / MKS Baratron gauge 100 Torr
- / Gate valve VAT
Gas box kit:
Gas box
Hotcan box cover
MFC STEC HE 500 SCCM
STEC N2 1 SLM
STEC H2 1 SLM
STEC HE 1 SLM
Gas filter 3000 PSI
Generator rack kit:
PDX-900-2V RF Generator with power cable
NT150 / 360 Turbo pump controller
AMPUL Heater
N2 Heater
Gas line.
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