Used AVACO Blank mask sputter for 1600 x 1440 mask #9395194 for sale
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ID: 9395194
Vintage: 2017
(4) SHIMADZU TMP-2304LM
Vacuum chamber:
Load lock / Unload chamber
(2) Transfer chambers
Process chamber
Conveying system:
AC Servo drive
Upper magnet guide + Lower roller drive vertical transfer and film formation
Sputter system:
(2) EN TECH PROFIBUS DC / Pulsed DC Power supplies for Cr Deposition
(2) Planar type cathodes
Film forming method: Mobile membrane
Substrate transfer type: Vertical transfer, Inter-back type
Vacuum exhaust system:
(2) EDWARDS IXL500Q Dry pumps
(2) CTI-CRYOGENICS SP-HPM40LQJIS Cryo pumps
(6) LEYBOLD MAG W2201IPL Turbo molecular pumps
Vacuum piping
Utility system:
PCW
CDA
N2
General exhaust
Process gas
Power system: 3 Phase, 60 Hz, 208 V ±5%
Substrate:
Board size: 1600 mm x 1440 mm, 5-10t
Substrate: Soda-Lime, Quartz
Loader zone: Base manual transport / Handling by MGV
Carrier loading: Roller drive (Vertical)
Shooting and depositing material:
Chromium
Chrome oxide
Chrome nitride
PLC Platform: MITSUBISHI Series-Q
PLC Communication standard: Profibus
MFC and Type: 36 MFCs, Digital MFC(AZBIL)
Operating system: Windows 7
2017 vintage.
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