Used AXCELIS Lot of spare parts #9288548 for sale

Qty / Part number / Description (1) / 17175270 / Shield, graphite adaptor (1) / 17126830 / Shield (3) / 0342-0175-4001 / Boards, system alarm (1) / 0342-0684-4001 / Board, interface i/o (2) / 0342-0049-4001 / Boards, chamber vacuum controller (2) / 0342-0158-4001 / Boards, switch interface i/o (1) / 0342-0452-4001 / Board, interlock i/o (1) / 17323340 / Liner pump chamber (2) / 3500731 / Quad rings (12) / 17167970 / Screw shield graphites (1) / 257622 / Motor left (4) / 17192390 / Graphites (1) / 3000525 / Elbow glass (4) / 17S4891 / Feed thru insulators (4) / 17S4889 / Spacers / machine name implanters (1) / 17S1597 / Feed thru 11 (2) / 17A0732 / Feed thru (1) / 1907490 / Feed thru (4) / 17251040 / O-ring filament holders (7) / 3500082 / O-rings (2) / 6500509 / Switches, nupro (1) / 17A0733 / Insulator, ceramic (5) / 4100028 / Collar (1) / 3100353 / TMP1000C Turbo pump / With ISO 250 flange and ISO KF40 foreline / For GSD200e2 implanter (3) / 1794471 / Pedistals, 4" (4) / 17132290 / Inserts (12) / 17192380 / Spacers (1) / 17227050 / Aperture, terminal (8) / 17119410 / Apertures, resolving housing vg (1) / 17227030 / Aperture, post acceleration (1) / 17237130 / Aperture, suppression (1) / 17102651 / Aperture, resolving housing (1) / 17100461 / Shield, cup (1) / 1521940 / Board, satellite extraction / with cooling plate (1) / 17099631 / Liner, inner dump (1) / 17119351 / Extension, tube vg shower (1) / 17122910 / Liner, analyzer magnet (2) / 17122950 / Liners, post acceleration (1) / 1067300 / Kit, striker plate disk faraday (1) / 17250670 / Line, gas plasma shower (1) / 17208240 / Aperture, beam defining (2) / 65S9021 / Switches, photo-fe5v-ta6 (2) / 17106390 / Seals, sliding-gsd200 (4) / 32S0142 / Valves, solenoid, vz5243-l6lz (2) / 543211 / Supplies, power / no contamination-no chemicals for form (1) / 1831050 / Gauge, filament (6) / 17174410 / Insulators, bias aperture (4) / 17127840 / Insulators, source (10) / 5001608 / Standoffs (1) / 3300287 / Controller, flow, GSD200 electron shower / STEC SEC-7320M, valve c, gas: xe,1 sccm / Calibration with Nitrogen, c.f. = 1.363 (1) / 1087740 / Kit, plasma shower (1) / 1067050 / Kit, electron shower (1) / 3300280 / Controller, flow Nitrogen 10 sccm / 1/4 vcr, fast start, edge card connect / Actual gas used is argon (2) / 5400-0005-1001 / O-rings kit, beam line (1) / 1520510 / Board, i/o (1) / 1505420 / Board, pneumatic switch (1) / 0342-0837-3001 / Cable, focus assy (1) / 86771 / Reflector kit, for model 150 deep uv (2) / 69272 / Assy, air jet s-curve holder (3) / 280891 / Spacers, upper, 4.9 mm id x 9 mm od x 2 mm (6) / 280781 / Spacers, 4.9 mm id x 9 mm od x 9.4 mm long (1) / 280812 / Showerhead, quartz, 8 dia with 1/4 holes (3) / 280252 / Showerheads, quartz, 8 dia with 1/8 holes (3) / 281041 / Rings, process shower lock, 7 id (6) / 280791 / Retainers, quartz process chamber (2) / 0342-0138-4001 / Boards, beam current display driver (1) / 5990-0097-0001 / Board, beam current amp iv (1) / 5980-0059-0001 / Power supply, acceleration / deceleration (3) / 0342-0458-4001 / Boards, unload indexer (2) / 0342-0459-4001 / Boards, end station interface (1) / 0342-0048-4001 / Board, cpu (3) / 0342-0441-4001 / Boards, a-d converter (1) / 5400-0006-1001 / O-ring kit, 5400-0006-1001 (EATON) (4) / 1979-0004-0001 / Filaments, skm style / 3 long / 2% thoriated tungsten (1) / 1713050 / Plate, INA source shield (1) / 17B5098 / Feed thru filament for hi cur 5 and 7 (1) / 17B5097 / Feed thru filament for hi cur 5 and 7 (1) / 11023240C / Dics / Setech 0702 8109 (6) / 286178 / Lamps 240 V / 1000 Watt (1) / 258212 / Screw lead cassette handler (1) / 17265240 / Insulating sleeve standoff (1) / 1176940 / Feed thru assy VAC (1) / 170093560 / Bushing insulating (1) / 17164580 / Target graphite e-shower (1) / 17237140 / Aperture ground (1) / 17170040 / Aperture extraction (1) / 17192420 / Electrode ground (2) / 17122910 / Liner extension tubes (1) / 17370590 / Liner pump chamber (1) / 17323350 / Liner pump chamber (1) / 17236740 / Liner pump chamber (1) / 17370610 / Liner pump chamber right (1) / 17236740 / Liners pump chamber (6) / 3500494 / O-rings buna 70 durometer (5) / 3500097 / O-rings buna 70 durometer (1) / 17370600 / Liner pump chamber left (1) / 17370580 / Liner magnet duct (2) / 5102745 / Feed thru, emer (1) / 17138730 / Graphite (1) / 110024630 / Valve gate (1) / 17S0170 / Bellows coupling (2) / 17346780 / Plates (2) / 17138740 / Plates (1) / 55902 / Switch service key (2) / 17335310 / Clamp filaments (1) / 17173230 / Plate (1) / 251172 / Cable, 16 pin female (2) / 257604 / Cables 3 axis robo left retract (2) / 257603 / Sensors, left extension - U763 (1) / 257601 / Sensor, right extension - U671 (1) / 1906850 / Bellows, in vac arm / for high current gsd200e2 implanters (2) / 398133 / Monitors, display / for a fusion deep uv gps 208 (1) / 47404 / Plate, quartz, 10-1/2 dia / for 8 deep uv only (2) / 238101 / Air jets b, for 8 deep UV cure (2) / 3500774 / O-rings (1) / 17165510 / Graphite (1) / 17236730 / Housing liner (3) / 6900165 / Resistors, 250 ohm +/- 10% (1) / 257621 / Motor right (1) / 26681 / Transformer, current (1) / 630701 / Transformer, hi voltage (1) / 1751910 / Pad.