Used EATON Lot #9123909 for sale

Lot of spare parts: Quantity Part Number Description 1 007-00285-000 CBLA, GAS BOX 1 007-00285-000 CBLA, GAS BOX 1 007-00944-000 CBLA, DATA BOX, GROUND 1 007-01855-000 CBLA, DAQ TO DATA BOX EXT 1 0342-01402-0001 VERTICAL TRANSFORMER/FILTER 1 050327 GATE PLATE ASSY 2 0547-0178-0001 BLOCK, HIGH VOLTAGE LNG, 1 063041 CONTACTOR-POWER,3 PDT 1 064745 CYLINDER 1.00 STROKE 1 065271 VALVE FLOW,CONTROL 5 085322 HEATER-2500W 2 0906-0191-0001 STEPPER MOTOR DRIVE AMPLIFIER 1 100-001-122 CLAMP SET 2 100001419.00 SPARE PARTS, VALVE V-12 2 100001662.00 SPARE PARTS, VALVE V-8 1 100006123.00 SPARE PARTS, VALVE V-8 10 1049140 INSULATOR RETROFIT E-SHOWRE 1 10523 LASER, LIGHT BARRIER 1 106-0102 KEYBOARD 1 10608 2 PC SKM ARC CHAMBER TOP PLATE 28 110-003-002B POST, MAIN CLAMP RING 1 110-004-050 NEEDLE BEARING 1 110-005-004 LIFT ROD 1 11019550 FARADAY FLAG 1 1102030 FEEDTHRU SOURCE GAS 2 1102202 CONNECTOR 2 1102680 HEAT SHIELD ASSY 3 1103250 DRIVE SHAFT ASSY 3 1103251 ROD DRIVE SHAFT LRG 4 1103650 FILAMENT FEED THRU & EXTENSION 4 1105670 ACTUATOR ASSEMBLY 1 1105670 ACTUATOR ASSEMBLY 1 1108700 END ASSY 1 1112350 BEAM STRIKER PLATE 2 1118120 MOTOR DAMPER 1 1118250R BEAM 2 1119800 TRANSPORTER ARM ASSY 11 112209001 INSULATOR WASHER 1 1125171 LINER 1 1134410 AIR/OIL FLTR ASSY 1 1151660 RETROFIT KIT 2 1152980 ACTUATOR ASSY 1 1153119 L/R BELLOWS ASSY 2 1153144 BELLOWS ASSY 1 1153670 ION BEAM ASSY 1 1153720 HOUSING, SOURCE MOUNT 1 1154094 CYLINDER 1 1163161 BELLOWS, VALVE ASSY 1 1168810 ACTUATOR 3 1172532 SOURCE FLANGE ASSY 1 1173380 ARM 1 1175790 F-S VENT A/C N2 SUPPLY 1 1175810 F-S VENT A/C CONTROL AI 2 1176570 REED SWITCH INTERLOCK 6 1185850 PIN-WAFER SUPPORT 8 2 1188730 NV10 DISK UPGRADE KIT 1 1190230 PNEUMATIC GROUND ASSY 1 1191790 SUPPLY HV RECEIVER 1 1194900 CHARGE MONITOR PK UP BOX ASSY 2 1198250 E SHOWER BACK BIAS 1 1198250 E SHOWER BACK BIAS 1 11S4238 SD SLIDE PLATE 2 11S4917 SHUTTER ASSY 9 11S5087 SPRING-COIL ASSY 3 11S5087-A SPRING COIL-ASSY 6 11S5088 SPRING-COIL ASSY 1 11S9413 MOTOR, STEPPER ASSY 1 1200173 T/C VERTEX HEATER JACKETS (ASAHI SANGYO) 4 1201350 LINEAR BEARING 5 12503172 DIAPHRAM 1 12S9005 COUPLING 6 12S9008 PULLEY E/S 5 12S9103 BOLT, MOD 3 1400630 LOG RATIO MODULE PCB 1 1400630 LOG RATIO MODULE PCB 1 1407400-S OPTOISOLATER BRD,DOSE CNTRL 1 1500005 ANALOG CONT 1 1500070 PCB, ARC CONTROLLER 1 1500070 PCB, ARC CONTROLLER 1 1500145 DISCHARGE RESISTOR 1 1500240 EXTENDER CARD 4 1500290 TEMP CONTROL VAPORIZER PCB 1 1500360 PCB 1 1500360 PCB 1 1500530 PCB, TEMPERATURE LIMIT CONTOL 1 1500600 CIRCUIT BOARD 2 1500610 TC/CRVD TEMP 3 1500610 TC/CRVD TEMP 3 1500660 VAC CONT. 3 1500660 VAC CONT. 3 1500670 VAC MOTHER 3 1500680 STAT DISPLAY VAC CONTRL 3 1500690 GRID POWER SUPPLY 2 1500700 ALPHA NUMARIC DISPLAY BOARD 1 1500700 ALPHA NUMARIC DISPLAY BOARD 1 1500770 PCB, I/O VACUUM CONTROLLER MANUAL 1 1500830 PCB, CURRENT VOLTAGE CONVERTER 4 1500900 VAPORIZE PCB CONTROL MOTHER BOARD 1 1500940 PCB, INPUT BUFFER 1 1500990 VAPORIZER CNTRL. BD. 3 1501020 PCB 1 1501020C PCB SUPPRESSION SENSE BOARD 2 1501040 PCB, ELECTRODE DIVIDER READOUT 1 1501040 PCB, ELECTRODE DIVIDER READOUT 1 1501061 FAST SCAN CANTER BOARD 2 1501061 FAST SCAN CANTER BOARD 2 1501070 FILTER BOARD 2 1501080 PCB, BATTERY BACKUP CONTROL 3 1501110 DISK SNSR PCB ASSY. 3 1501120 DISK SENSOR BD. 1 1501150 PCB, ANALIZER, MAGNET 1 1501210 D/A CONVERTER TRI-124 2 1501240 PCB, TI CPU 1 1501250 STATUS DISPLAY 1 1501270 SENSOR BD. 1 1501280 PCB, I/O CASSETTE TO CASSETTE 3 1501290 LED BD. 1 1501300 PCB, INPUT TO I/O 80 1 150131- PCB 2 1501320 PCB, 36 OUTPUT BUFFER 3 1501320 PCB, 36 OUTPUT BUFFER 1 1501330 PCB, STEPPER MOTOR OUTPUT INTERFACE 1 1501360 PCB, DATA ACQUISITION 3 1501490 DATA AQUISITION PWR. SUPPLY BD. 3 1501510 PCB 2 1501521 PCB W/RESET SWITCH 1 1501600 PCB, REMOTE EMISSION CONTROL 1 1501620 DATA RECEIVER PCB 1 1501620 DATA RECEIVER PCB 6 1501660 PCB, STEPPER MOTOR DRIVER 3 1501670 TRANS BOARD 5 1501700 PCB CONSOLE BEAM CONTROL DATA LOCK 1 1501710 PCB, PNEUMATICS COMMUNICATIONS 8 1501710 PCB, PNEUMATICS COMMUNICATIONS 1 1501720 FRONT PANEL INPUT CARD 8 1501820 DATALOCK SLAVE OPTO BD 2 1501880 HIGH VOLTAGE DIVIDER PCB 1 1501890 HIGH VOLTAGE DIVIDER PCB 2 1501990 KEYBOARD,PCB 1 1501990 KEYBOARD,PCB 1 1502434 STOMPER, SOCKET, W/FB 1 1503020 PCB, TM990/310 MODIFICATION 6 1503040 PCB, TM990/201-42 MODIFICATION 6 1503070 BEAM CNTRLR RMTE ASSY 1 1503100 PCB, BUFFER OUTPUT 3 1503180 BEAM CONTROLLER I/O BOARD 2 1503180R BEAM CONTR. BRD 1 1503190 PCB, FLOOD GUN 8 1503230 PCB, ANALOG A/D 1 1503230 PCB, ANALOG A/D 2 1503520 EMISSION CONTROL PC BOARD 1 1503540 PCB, VAC I/O 1 1503560 FIBER OPTICS BOARD 1 1503720 PCB, VAC I/O 1 1503860 PCB, ASSY MEM EXP W/IO MOD 1 1503860 PCB, ASSY MEM EXP W/IO MOD 2 1503880 PCB, DOSE CONT OPTO ISOL 1 1503960 EMO BACK PLANE BOARD 1 1503990 PCB, OPTO I/O 1 1503991 PCB, OPTO I/O 4 1504030 RMTE. VAC. CONTRLR ASSY. 2 1504080 CASS.STEPPER CONTRLR. 1 1504100 PCB ASS'Y FLAT SNSR 1 1504320 GAUGE (SPAN) 1 1504320-E PCB ASSY 1 1504365 PRESSURE GAUGE 1 150448 PCB,EMB/THD,REV.A 1 1504480 PCB, ASSY Z-80 CPU 1 1504490 I/O ISOLATOR EXTENDER CARD 1 1504580 PCB, ASSY PWR CONT 2 1504650 PCB, ASSY WATCHDOG 1 1504680 ELEVATOR SENSOR BOARD 2 1504690 PCB, CASSETTE 1 1504730 POWER SUPPLY 1 1504790 PCB, CONTROLLER, MOTHER 1 1504840 D.T. ES A/D BOARD 1 1504850 ROTARY DRIVE PIGGY/BACK BAORD 1 1504880 PCB ASSY, L SCR DRV I/O 2 1504910 PCB, ASSY 72 CHAN I/O 2 1504920 PCB, ASSY CPU CD SCONT 1 1504920 PCB, ASSY CPU CD SCONT 3 1504930 PCB, ASSY CPU CD MATROX ES 1 1504940 PCB, ASSY ANALOG ES CONT 1 1504950 PCB, ASSY CMOS RAM 2 1504950 PCB, ASSY CMOS RAM 1 1505040 PCB ASSY, 150MM ALIGN RCVR 1 1505050 DATALOCK INTERFACE BOARD 1 1505150 PCB, ELECTRON SHOWER 4 150518 PCB, ELECTRON SHWR PWR 1 1505200 PCB ASSY, FENCE SENSOR 1 1505230 PCB, ARC FILAMENT & SERVO 1 1505230 PCB, ARC FILAMENT & SERVO 1 1505270 PCB, CONTROLLER BUFFER 1 1505280 POWER SUPPLY BOARD 4 1505420 SWITCH PCB 2 1505722 PCB, AMU GROUND LEVEL 2 1505750R OUTPUT BUFFER BOARD ASSY 2 1505840 PRESSURE GAUGE (SPAN INST.) C122 1 1505880 PCB BEAM CONTROLLER 1 1507040 RELAY BD. 2 1507050 TRANSMITTER/IMP PCB 1 1507060 PCB RECEIVER BOARD 2 1507400 PCB, OPTOISOLATOR DOSE CONTROLLER 2 1507740 RMT A/D I/O CONT PCB 1 1516810 PCB, 4 CHANNEL OPT 1 1516860 PCB, AUTO TUNE MOTHER 2 1516880 BUFFER, AUTO TUNE I/O 1 1516940 PCB ASSY, SCR INTERFACE 1 1517010 PCB, ASSY NV20 ES TRANS PROT 2 1517380 PCB ASSY 1 1517590 ELECTRODE DIVIDER READOUT PCB 1 1518070 EXTENDER PCB 1 1518110 TERMINAL CONTROL I/P BUFFER BOARD 1 1520310 PCB ASSY,DISK SNSR #2 2 1520930 PCB ASSY,VAC CASS WFR 1 1520980 EXTENDER CARD 6 1521130 PCB ASSY CHARGE SENSOR 1 1521220 PCB OPTO ISOLATOR DOSE 1 1521900 CIRCUIT BOARD, 1421900 REV A 2 1521960 PCB ASSY,VACC CASS PHO 2 1521980 PCB,ASSY,HV ELECT SUP 2 1522230 PCB ASSY 1 1522250 PCB, MASTER OSCILLATOR 2 1522920 THERMOCOUPLE DI CRYO INTERLOCK PCB 1 1523310 PCB ASSY, CHARGE MONITOR CAL 1 1523560 PCB ASSY, DISK VAC INTERFACE W/ CHARGE 12 1550-0036-0001 HIGH VOLTAGE APERTURE 2 1550014 Y-SCAN MONITOR PCR ASSY 2 1550026 REMOTE CONTROL LH 02 B10 1 1550028 CONTROLLER REMOTE P.C. BAORD ASSY 2 1550047 VME BUS COMM INTERFACE 1 1550110-A EMO LOCAL 1 1555006 PHOTO INTERVPTER 2 1555018 GLITCH COUNTER LH-03-B6 1 1555020 AD CONVERTER 3 1557031 SERVO CONTROL BOARD 1 1557034 SERVO CONT. 1 1557059 STEPPER MOTOR CONT. 1 1578002 RING, SCREEN 2 15S0073 6 SLOT MOTHER BOARD 1 15S0076 OPT FIBER BD 1 15S0125 PCB ASSY DIODE BD. 1 15S0134 PCB END STATION INTERCONNECT BD. 1 15S0321R PCB 1 15S4002 PCB,ASSY,DISK,INDEX,INTERFACE 1 15S7058 STEPPING MOTOR CONTROLLER 2 1601377 CA DUAL FIBER OPTIC 1 1601632 CBL 40P 15" 1 1601633 CBL 40P 7" 2 1601664 CBL 26P 15" 1 1601780 CBL. VAC. ARM 2 1601940 HARNESS ASSY,FDAY FLAG 1 1614400 CABLE ASSY, TRIGGER/RELAY HYT 1 1614410 CABLE ASSY, FRONT SIDE VENT 1 1616680 CABLE NON-VAPORIZING 1 1617030 CABLE ASSY 3 COND DI 1 1617030 CABLE ASSY 3 COND DI 1 1621413 CABLE,FILAMENT,160KV 3 1621420 CABLE ASSY 4 1621421 CABLE ASSY 3 1621422 CABLE ASSY 2 1628140 CABLE, TEMPORARY LIGHT POW 1 1628240 CBL RETRO SPLIT CHARGE MONITOR PIC 1 1628250 CBL RETRO SPLIT CHARGE MONITOR DIS 1 1631020 CYLND REED SWITCH ASSY 4 1700220 RISE KNOB BOLT SC 14 1700250 WASHER 12 17018090 SLUG 12 17018100 REAR STOP 1 17018120 REAR STOP 2 1702040 FEEDTHRU HV BRASS 4 1702040-A BRASS FITTING 2 17021590 INSTR GRAPHITE ACCEL 5 1703070 HOLD DOWN PIN 3 17032040 STRIKE PLATE ALUM. 3 17032270 VALVE SHIELD 3 17033340 NOZZLE 1 17033380 HOUSING ANTIMONY INDIUM VAPORIZER BODY 1 17034501 COMPRESSOR (TECUMSEH) 2 17034870 ELECTRON SHOWER APERTURE 21 17036190 NOZZLE,RETAINER,ENLARGED,VAPORIZER 1 17036670 20A SOURCE BASE PLATE 1 17042280 TIP, RUBBER 4 17043870 FILAMENT CLAMP, 0.4" 3 17045990 BLANK OFF PLT ELCTRN 2 17046120 CONNECTOR, BOTTLE CGA 35 4 17046120 CONNECTOR, BOTTLE CGA 35 1 17046130 CONNECTOR, BOTTLE CGA 33 18 17048330 SPLIT BUSHING 1 17049260 PILOT DISC. ISO VALVE 1 17049270 COVER 5 1705001 BASE PLATE ARC CHAMBER 6 1705030 CHAMBER MOUNT ARC 3 1705342 CLAMP LEVER 2 17055230 STOP DISC CONN 2 17059440 BLANK OFF FARADAY FLA 4 17062932 GRAPHITE LINER BLOCK ANGLE (NO.2) 4 17062933 LINER BLOCK 2 17062934 LINER BLOCK 4 17062935 LINER BLOCK 8 1706370 VAPOR NOZZLE 6 1706380 VAPORIZER NOZZLE RETAINER CAP 11 1706410 TC CLIP 13 17064260 ELECTRODE GROUND PLATE 2 17066491 GND ELCTD 1.0M VG 9 17066870 FLAG STRIKE PLATE 2 17068740 BRKT LATCH END STATIO 3 17070570 APERATURE ACCELERATOR NO 1 NV20A 2 17076830 BLANK OFF SOURCE EXT. Y6X 9 17076840 BLANK OFF PLT ELCTRN Y6X 8 17079740 BEARING, CARBON 2 17079750 BEARING, CARBON 2 17083070 FEEDTHRU(IV) 2 17083680 SHIELD SOURCE PLATE 9 17088340 PLATE INSULATOR 15 17088430 LG. NOZZLE 5 17088430 LG. NOZZLE 1 17091820 HYT ADAPTER KF40 1 17091830 BLANK OFF HYT CHAMBER 1 17091840 HYT SENSOR HOUSING 2 17092180 SCREW CAPTIVE 6-32 X 7/16 2 17093930 BLOCK OFF PLATE 2 17093940 BLOCKOFF PLATE 2 17093940 BLOCKOFF PLATE 2 17093950 BLOCK OFF PLATE 3 17093950 BLOCK OFF PLATE 3 17095130 BELLOWS BLOCK OFF PLATE 4 17095130 BELLOWS BLOCK OFF PLATE 18 17097250 INSULATOR SHIELD 1 1709730 PLATE 44 17097310 INSULATOR BUTTON 7 17097320 SPACER 6 1709750 BEARING 10 17097612 FRONT SLIT PLATE 1 17098180 GUIDE-1 17A7181 1 17098490 RING ALIGNMENT 9 17098981 PLATE INSULATOR 14 17099181 FARADAY FLAG APERTURE 6 17099281 EXTRACTION APERATURE 1 17099380 DUMP NNER DEAM GRA 1 17099471 EXIT POLE LOWER 10 17099631 INNER BEAM DUMP 1 17099820 SHIELD 1 17099950 BRACKET 5 17099971 OUTER END 12 17099981 POST ACCEL APERATURE 2 17100190 EXHAUST TUBE 4 17100220 GRAPHITE SHIELD 1 17100520 GRAPHITE, EXIT DU 1 17100521 EXIT DUMP VGI GRAPHITE 54 17101000 SHIELD INSULATOR 2 17101140 GAS LINE SOURCE 1 17101290 BRKT MTG BEAM DUMP H2 1 1710160 PLUG. CHAMBER BLK OFF 2 17102611 OUTER END 1 17104001 POLE 1 LOWER 1 17104022 POLE 3 UPPER 1 17104031 POLE 4 LOWER 1 17104032 POLE 4 UPPER 14 17107290 SHIM .010 14 17107300 SHIM .005 10 17107310 SHIM .002 4 17107370 SCHRAUBE FILAMENT MOUNTING HS10 1 17107970 FEEDTHRU-GAS LEAD 8 17107980 EXPANSION, STRAP 8 17107990 EXPANSION, STRAP 1 17108000 GRAPHITE ELECTRON SHOWE APERTURE 12 17108940 SUPPORT INSULATOR 10 17108950 FIELD RING 1 17109090 ARC CHAMBER 37 17109340 BUSHING SNAP INSUL. 1 17109420 BAR CRYO REMOVAL 37 17109910 BUSHING, SNAP INSUL. 4 17110121 EXTRACTION ELECTRODE APERTURE 8 17110131 APERTURE 5 17110141 EXTRACTION ELECTRODE APERTURE 3 17110151 MANIFOLD 1 17110900 BRKT 90 DEGREE FRT PNL MTG 4 1711172 SFT ELECTRODE 2 17112070 SHIPPING BLOCK 1 1711312 LEVER-TILT LEVER 14 1711460 SPACER 2 1711490 DRIVE NUT, ELECTRODE 6 1711500 BEARING SCREW 5 17115920 APRT SPRT LINAC 12 1711640 CLAMP PIN 3 17118420 SB NOZZLE RETAINER 3 17118430 ANTIMONY VAPORIZER 3 17118440 SB NOZZLE 3 17119351 EXTENSION TUBE 6 17119410 APERATURE RSLV. HSG.VG 23 1712040 CARBON BUSHING 3 1712070 SINGLE GAS ELECTRODE GROUND PLATE 3 1712090 WEDGE NUT A607 11 17121720 E-SHOWER SHIELD 4 17121910 HEAT SHIELD 2 17122420-B BLANK OFF PLATE INSUL Y6X 1 17122880 SHIELD VARIABLE ELECT 4 17122920 EXTENSION TUBE 2 17122920-A EXTENSION TUBE 13 17122960 QUAD LENS LINER 1 17123000 GRAPHITE LINER 5 17123010 TUBE-EXTENSION 2 17123010 TUBE-EXTENSION 1 17124250-A CLAMP,DISKRING 37 17124410 RETAIN ROD SPACER 1 17126830 INSERT PLATE 4 17126830 INSERT PLATE 20 17127610 REPELLER 23 17127620 ARC CHAMBER MOUNTING BLOCK 3 17128110 FACE PLATE 16 17128250 SHIELD SOURCE 7 17128490 SEAL SCREW (5/16-18) 13 17129700 STRIKE PLATE 16 17129710 STRIKE PLATE 19 17129720 STRIKE PLATE 5 17129720 STRIKE PLATE 28 17129730 STRIKE PLATE 15 1713050 GRAPHITE END PLATE 2 17131030 E-SHOWER TARGET 2 17131030 E-SHOWER TARGET 8 17132280 EXTRACTION APERATURE 22 17132290 GROUND APERATURE 2 17133450 FILAMENT SUPPORT ELS/VAE 4 17133730 GAGE PIN 2 17133820 SUPPORT BRACE 3 17135310 GAS LINE, P-SHOWER 7 17135380 GAS FEED FITTING 20 17135680 P-SHOWER TUBE RING 11 17138720 MOUNTING PLATE BIAS 1 17138720 MOUNTING PLATE BIAS 6 17145120 STAINLESS TUBE 4 17145260 INSULATOR 10 17145730 FEEDTHRU 16 17147950 SHIELD INSULATOR E.E 4 1714970 GRAPHITE BUSHING 1 1715000 GROUND PLATE QD 1 17156800 CHASSIS GEN DISK VAC 9 1715950 HOLD DOWN 6 17164490 INSULATOR E-SHOWER SU 2 17164500 GAS BLEED TUBE 19 17164520 VG MAGNET BRACKET 8 17164560 EXPANSION STRAP LEFT 10 17164580 TARGET GRAPHITE E-SHO 15 17165510 VG MAGNET BRACKET 1 17165510 VG MAGNET BRACKET 43 17168940 ELECTRODE INSULATOR 28 17168950 SHIELD INSULATOR 8 17170020 PLATE EXTRACTION ELECTRODE-GSD 17 17170050 SHIELD-BRACKET 20 17170610 REPELLER STUD W ELS/VAE 28 17174410 INSULATOR 16 1718290 ELECTRON SHOWER FILAMENT SHIELD 10 1718300 ELECTRON SHOWER FILAMENT INSULATOR 4 1718490 SHIM DISK 3 17185620 GRAPHITE APERTURE 4 17185630 APERTURE CENTER 12 17185640 APERTURE RIGHT 1 17192380 CERAMIC CYLINDER 14 17192390 FITTED CYLINDER 12 17194470 ARC CHAMBER PLASMA SHOWER 12 1720090 NUT DRIVE 2 17206140 GAS LINE 4 17208240 BEAM DEFINING APERTURE 1 17236740 GRAPHITE LINER VG, PUMP 1 17239360 LINER VG-MAGNET DUCT 1 17239360 LINER VG-MAGNET DUCT 1 17239370 LINER VG-PUMP HOUSING 4 17245530 INA 56666 RPL BY 1724 2 17251090 STRAP,34 SUPPRESION 4 17261740 GRAPHITE SHIELD SUPPORT 4 17264910 APERTURE,RIGHT CVA 3 17264920 APERTURE 3 1730130 CLAMP RING DISK 2 1734550 RIGHT SIDE SHOUDPULLEY COVER 1 1737760 SCE COOL TUBE 160 1 1738638 COLLAR 6 1739150 RETAINER 13 1739160 ANTIMONY NOZZLE 14 1739470 MOUNTING PLATE FOR GROUNDING PIN 15 1740290 GAS FEED TUBE 4 1740330 APERATURE GRAPHITE BEAM 5 1740530 PLATE, GRAPHITE 7 1740680 GRAPHITE APERTURE 1 1740740 MUFF CLAMP 2 1741070 ACCEL APERTURE #2 1 1741430 INSULATOR FEEDTHRU F.G. 1 1744690 TOP INSULATOR 8 1747010 BARS 3 1747110 RING, FRICTION 1080 HUB 2 1749380 BRACKET 2 1749620 POLE PIECE MAGNETIC DEFLECTOR 1 1750580 CLAMP DISK PEDESTAL 5" 5 1759240 TAB SPRING 2 1759638 PULLEY 10 1765730 APERATURE, ACCEL ELECTRIDE 1 1766531 GRAPHITE PLATE 3 1769120 LOWER APERTURE INSULATOR 2 1772020 FCEPLATE, ELECTRODE 1 1784780 FEEDTHRU CONNECTION 2 1784880 HOUSING ELECT SHOWER GUN 3 1786320 CONNECTOR, POPPET DISC 276 1789830 GRAPHITE REPELLER PLATE 68 1790420 REPELLER SHIELD PLATE 1 1794580R PEDESTAL RED RTV 8 1794611B CLAMPLESS PEDESTAL 2 1795470 APERATURE #3 (NOVA) 16 1795560 CHAMBER, SLIT ARC FRONT 1 1796720 ELECTRODE CONNECTOR 6 1797210 APERATURE, HIGH FIELD 2 1797220 ELECTRODE, GROUND 4 1798470 PLATE, SUPPRESION 4 1798560 APERTURE, BM 4 1799990 PLATE SHOWER BIAS 1 17A0480A VAC CHUCK, 6" 1 17A0740B TARGET ELECTRIC SHOWER 8 17A0844 FEEDTHROUGH - INSULATOR BIAS 13 17A0846 NUT-SPECIAL 23 17A4239 SLIDE BLOCK 4 17A6594 LEVER 4 17A6595 BRACKET 4 17A6596 DISK FENSE FOR GSD 2 17A7505 STOPPER-CTR 200MM GSD 100 3 17A7506 BRACKET 4 17A7507 SHAFT, 8 17A7517 BUSHING 6 17A7521 WEIGHT 1 17A9576 CHUCK, VACUUM 1 17A9660 VACUUM ARM CHUCK 1 17A9678 CHUCK, DUMMY VACUUM 1 17A9679 CHUCK,OURPUT VACUUM 11 17B3494 ARC CHAMBER HOUSING 3 17B3498 CLAMP FILAMENT PEF 4 17B3555 STRAP CLAMP 14 17B5101 INSULATOR NIBBLE 16 17B5815 ARC CHAMBER INSULATOR 20 17B8384-A SOURCE SHIELD PLATE GRAPHITE 9 17S0974A APERTURE ACCELERATOR ASSY 3 17S0986 APERTURE,MAGNETIC DEFLECTOR 2 17S1905 PARTICLE TRAP 5 17S2466 PIN 1 17S2667 COOLED SUPPORT 1 17S4398 SEAL 2 17S4399 SEAL 16 17S4515 SIDE BLOCK 2 17S4523 12IDE BLK(3) 1 17S4874 COOLING BLOCK 1 17S4879 INSULATOR 2 17S4882 INSULATOR 11 17S4909-A INSULATOR FOR ELEC SHOWER 2 17S4923 INSULATOR 2 17S8398 CLAMP PLT 6 17S9860 BUSH 4 1820260 BLOCK 2 1820280 WAFER ALIGNMENT FIXTURE 2 1820281 WAFER ALIGNMENT FIXTURE (100MM) 1 1820282 WAFER ALIGNMENT FIXTURE (125MM) 2 1820283 WAFER ALIGNMENT FIXTURE 2 1825390 GAUGE SHOCK ABS MTG. 5 1825970 MAIN ARM REMOVAL TOOL 1 1826910 GSD-B 150MM DISK POS 4 1828460 TARGET 1 1828550 ALIGNMENT FIXTURE 3 1833870 TOOL ALIGNMENT ELS FI 1 1833940 200MM ROTOR SETUP FIXTURE 4 1838470 ALIGNMENT FIXTURE CVA 2 18S0432 6" TOOL PLATE 1 18S0450 PLATE 1 18S0450 PLATE 1 18S0451 PLATE 2 18S0451 PLATE 2 18S0452 BLOCK FOR TILT BELLOWS MAINT. 1 18S0466 DISK-INDEXER JIG 4 18S0467 DISK POSITION CONFIRM 1 18S0537 PLATE-8 1 18S0898 DISK-INDEXER JIG 1 1900071 A/D BOARD 2 1900900 BELLOFRAM DISC CENTER 1 1905370 CYLINDER DISK COVER 3 1911850 BELLOWS AMU APERTURE 7 19967600 REPELLER, MO 36 19S0034 PULLEY 1 2000045 PCB, EMITTER 1 2028846 SENSOR, THRU BEAM 2 209711 CAP-PIPE 2 INCH 4 2100010 POWER SOURCE 1 2100019 AMPLIFIER 1 2100032-S PWR SUPPLY 1 2200005R POWER SUPPLY, KAISER 2 2500760 QTZ. INLET 4 2504758 QTZ.DOOR PLATE 10 2504766 QTZ.SOCKET 200MM 4 2504820 QTZ.TC BRIDGE LPCVD 3 2504901 INFLATABLE SEAL 10 2509482 QTZ.CENTER PIN 3 2509490 QTZ. ADAPTOR PLATE 23 2510863 QTZ.SOCKET 150MM 2 2529114 QTZ.EXHAUST TUBE 35 2534045 QTZ.DISC. PEDESTAL 5 2534452-01 QTZ. PEDESTAL CAP 3 2545667 QTZ.TORCH 5-12 SLM 13 285592 BAFFLE PLATE ASSY, 8" WAFER, MCU 7 3000057 FILTER M635 1 3000071 FLANGE BLANK OFF KF40 24 3000275 FILTER ELEMENT HOUSING 1 3000312 ARRAY 4 3000431 FILTER 1 3000432 RGLTR, SS VCR 4PORT N 2 3000486 ADPTR KF40 FEM 1/8 NPT 4 3000504 FILTER,CRIG,10 MICRON 5 3000505 FILTER 1 300066-S FILTER 4 30S0066 SHOCK ABSORBER (KSHA-6) 1 31-241R TURBO 2 3100-0029-0001 INSERT PLATE 2 3100044 BELT 2 3100068 VACUUM PUMP 2 3200004 VALVE, ROUGHING BRASS 1/2 2 3200051 NUMATICS VALVE 1 3200274 VALVE, SHUTOFF, HE LEAK TEST 2 3200483 VALVE, RELIEF 1 32S9006 JIG CYLINDER 6 3300109 TC GAUGE TUBE 2 3300191 REGULATOR, VALVE 4 3400081 RDCR TUBE END 30 3400094 PL M 1/8NPT BRS 13 3400191 UNION,1/4 31065600 LEGRIS 5 3400214 CONN M 318TX1/8 MPT 5 3400416 NUT & SLV ASSY 3/8 26 4 3400619 BUSHING REDUCING 1/2 1 3400891 UNION 1/4 SS 2 3400975 PLUG 3 3401541 FLG BLANKOFF KF40 7 3401541 FLG BLANKOFF KF40 8 3401543 CLP TGL KF25 31-8803 4 3401549 CTR RING AL-VITON KF1 11 3401550 CTR RING AL-VITON KF2 5 3401738 ADPTR M 1/2 NOTX1/2 H 2 3402041 CONN M SS-4-VCR-1-4 1 3402086 MALE RUN TEE 3/8 TUBE 8 3500003 O-RING,SOURCE FLANGE 1 3500021 O-RING 7 3500027 O-RING 97 3500032 O-RING, COOLING 7 3500033 O-RING 39 3500034 O-RING (BUNA-361) 4 3500044 O-RING 1 3500049 O-RING 7 350005 KIT GASKET AVG-150 SERIES 7 3500050 O-RING SLIDING SEAL NO 4 10 3500057 O-RING, BUNA, .114 16 3500060 O-RING ROUGHING LINE 47 3500067 O-RING VAPORIZER 2 3500074 O-RING V5,V17 VALVE 43 3500076 O-RING BUNA-010 18 3500105 O-RING BUNA-228 1 3500113 0-RING 1 3500133 BELLOWS ASSY 22 3500153 SM BELLOWS 16 3500506 RING CENTERING ASSY LF 250 7 3500602 O-RING VITON-448 16 35S0049 O-RING 2 35S0093 O-RING 3 3600027 CYLINDER 2 3600029 CYLINDER 11 4000039 MOUNT RUBBER 65 4000073 SOURCE KNOB 29 4000090 SPRING EXT 2 4000091 SPR EXT LE-0370-5 10 4000184 SPRING, COMPRESSION 1 4000464 STATIC ELEMINATOR POWER UNIT, SIMCO 3 4000732 STUD 20 4001150 SPACER 1 4001638 POWER SUPPLY 2 40834 ELECTRODE MOUNTING PLATE, STAINLESS STEEL 3 40S0055 SPRING,TENSION 8 40S0057 SPRING,COMP COILED 1 40S0182 BELLOWS COUPLING 3 4100021 GEAR 48PT 18 4100028 FILAMENT COLLAR 3 4100166 GEAR SPUR 48PT 3 4100167 COUPLING FLEX 8062-B 2 41S0065 BELT, TIMING 1 41S0079 BELT, 037-XL 3 41S0081 BELT, 97T-80-6,4 2 41S0082 BELT,STS 25058M600 3 41S3012 BELT,B98MXL6.4 3 41S4003 BELT 2 41S4004 BELT, SYNCRO 450H100G 2 41S9037 BELT, TIMING 3 41S9039 BELT TIMING 3 41S9040 BELT, TIMING 2 41S9049 BELT, 037XL 1 4200010 BEARING, ROD END 17 4200014 ROLLER CYL QB34812 TOR 2 4200015 BEARING 8 4200030 BALL BEARING 2 4200032 BEARING 7 4200077 BEARING THR NTA-613 T 12 4200312 GARLOK BEARING 8 4200335 BEARING,LINEAR BALL 2 4200358 BUSHING-SHIELD 1 42S0034 DEEP GROOVE BALL BEARING 1 42S0083 BEARING 6002 ZZ SS 1 42S0148 BALL BEARING 1 4300019 PIN ROLL (AMPHENOL) 50 4300020 PIN DOWEL 192 4300031 CIR CLIP 2 4300500 RETAINING RING 7 434201 GAS BOX 1 43S0174 CLIP 20 4400059 WASHER FLAT #06 20 4400122 WASHER FLAT #08 1 442381 RING RETAINING 1 4500008 SCR, 5/16-18X1 S/ 3 4500072 RELAY 2 4710-0069-0001 MOUNT-ARC,REPELLER SIDE 1 4710-0069-0001 MOUNT-ARC,REPELLER SIDE 1 5-Y-41433-402-PD-Q PREDETERMINED COUNTER 88 5000024 CERAMIC STANDOFF - 1/2 x 5/8 8-32 1 5000038-S CONTACTOR, K-50-AC 120V 2 5000110-S RELAY SOCKET 299 5000132 CERAMIC STANDOFF 3/8 X 3/8 6-32 1 5000146 RELAY,12VDC ( D5PR3R1) 2 5000157 BREAKER 5 5000174 RELAY 120VAC 10 5000368-S SHORTING BAR 5 5001123 BRUSH MOTOR GRAHAM D3 1 500146 RELAY, 12VDC 10A PLUG IN 2 500147 RELAY, 120V 10A PLUG IN 300 505065 BLOCK,CERAMIC, 1X1.X.025 2 50S0116 ROTARY ENCODER 1 50S0139 RELAY, SRCA 3931-02 14 5100009 SKT OCTAL,W/HD 78-PF8 2 5100180 MOLEXPIN 1 539202 THERMOCHUCK, 240V, POLO, W/ CENTER PINS 15 54S0005 FUSE 2A 250V 20 54S2001 FUSE 6A 250V 1 5500111 MOTOR 1 55S9015 DC SERVO MOTOR 1 5700032 POWER SUPPLY 1 5865020 VALVE 2 5867-0012-0004 FITTING,QDISC,INSERT,1/4 1 5880-0108-3001 PLATE LENS MOUNTING 10 5880-1230-0001 PLATE, GND, GRAPHITE, CE 1 5990-0147-0003 PCB, BEAM PROFILER 1 5990-0174-0003 PCB, ASSY, SCAN GENERATOR 15 6000049 VARISTOR GE V250LA40A 3 6040-0001-0002 PULLEY 6 6100070 DG301CJ SILICON 9 6100184 I.C AD5223D 3996I-005) 2 6100195 ALPHA NUMERIC DSPL 1 6100207 TRANSISTOR 1 6100324 BAND FIBER OPTIC CABLE BOARD 2 6100797 ILQ2 IC QUAD ISOLATOR SEIM 2 6100803 INTFC. RS-232 BD. 4 61S0024 IC PC 525 1 61S0029 IC KM 3702 2 61S0030 IC MC 14490 1 61S0042 IC DAC800-CB1-V 2 61S0047 ICICL7107 2 61S0060 IC CD 2 61S0061 IC 28681-12BS 1 61S0081 IC UPC 454 2 61S0086 IC ICL 7117 2 6300064 TRIAC 1 6400021 DIODE 4 6400150 BRIDGE RECTIFIER 12 648011 SOCKET 2 64S0030 SURGE ABSORBER 2 64S0032 SHOTKEY BARRIER DIODE 10 64S0035 SURGE ABSORBER 2 64S0044 IC PC 817 2 6500018 INA 1350 SWITCH, TOGGLE 1 6500037 PRESSURE SWITCH 11 6500115 SWITCH 9 6500150 SWITCH 6 6500153 SENSOR 3 6500476 SW PRESS W117G-5-H-K12L36-X 2 6500502 SWITCH MAGNETIC SENSOR 3 6500509 SW,LIMIT (MS-ISK-BN) 2 65S0019 RELAY 2 65S0025 PHOTO SENSOR LMS 3 65S0034 MAGNETIC PROXIMITY 3 65S0035 MAGNETIC PROX SW D-A80 3 65S0036 MAGNETIC PROXIMITY SW 1 65S0094 SW VACUUM 11 65S0104 PHOTO MICRO SENSOR EE 8 65S4005 SENSOR, CS5B 2 65S9002 FIBRE UNIT 3 65S9015 PHOTO INT TLP851 16 65S9017 PHOTO INTERRUPT 1 65S9018 PHOTOSENSOR 3 6600085 TRANSFORMER-24VAC M4L 3 1033 4 6600085 TRANSFORMER-24VAC M4L 3 1033 2 6700087-S CONDENSOR 2 6964001 LINK, ANGLE 18 7103-0036-3001 INNER MAGNET LINER SHIELD 16 7103-0041-4002 OUTER MAGNET LINER 3 7142-0006-0001 SLIT, FRONT, FIXED ARC 298 7230-0139-0002 STANDOFF-GND PLATE TO EXTR ELECTRODE 1 75343 RF DETECTOR 1 830012532 SWITCH 63A MAIN 3P+N 6 96092 INSULATOR CHUCK 3 994752-000 PCB, TM990/310 1 C316FNA3S THERMAL OVERLOAD RELAY 1 E1500240 EXTENDER CARD 3 E1500270 PCB, ARC, CURRENT, CONTROL 1 E17136630 ADAPTOR 1 E53CAL34T110E CAPACITIVE PROXIMITY TUBULAR SENSOR 1 LU-A-657 SLIDE BEAM WIDTH SLIT 3 LU-B-659 PLATE, SLIT 2 LU-B-696 MOD. DRIVE BELT 3 U447082 WAFER-PAN TIP SS ASSEMBLY.